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Lossless Electron Beam Monochromator for Enhanced Resolution in Electron Microscopy

Project description

Compression rather than filtering eliminates electron beam losses

The spatial and spectral resolution of advanced high-resolution electron microscopes are diminished by the energy spread of the electron beam, which causes chromatic aberrations. ‘Monochromators’ using mechanical slits as a band-pass filter are often used to correct this, but they result in electron beam losses. The ERC-funded Loss-less Monochroma project intends to develop a simplified monochromator based on a single crystal inside the microscope column. Infrared laser pulses will generate THz radiation in the crystal that will interact with the electron beam, compressing rather than filtering the electron energy and thus eliminating beam losses. The pioneering crystal technology will be retrofit-compatible in conventional low-cost electron microscopes to improve their performance.

Objective

Lossless Electron Beam Monochromator for Enhanced Resolution in Electron Microscopy

The performance of advanced high-resolution electron-microscopes (EM) is severely limited by the energy spread of the electron beam, which limits both spatial and spectral resolutions by causing chromatic aberrations. To mitigate this limitation, monochromators are used. Common monochromators have mechanical slits as a narrow band-pass filter, inherently introducing high loss to the electron beam. They are very complex and thus highly expensive. Here we propose to develop a novel electron monochromator technology that is lossless, relatively simple (and thus, cost-effective), and modular, so it can potentially be installed as an upgrade in a wide range of existing EM systems. The proposed monochromator compresses the electron energy rather than filtering it, and thus the resulting electron beam suffers no losses. We use a single crystal, located inside the microscope column, close to the incoming electron beam. Infrared laser pulses are used to generate THz radiation in the crystal which interacts with the electron beam such that the energy of the electron beam is compressed without introducing electron losses.

We aim to achieve this through three main goals: (1) Demonstrate the ability to get strong energy compression in pulsed electron mode with the advantage of low losses. (2) Demonstrate that our idea can also upgrade the performance of traditional low-cost CW operating EM such as low-voltage scanning EM (LV-SEM). (3) Commercialize our IP and penetrate the market. We developed new IP, aiming to commercialize the technology at the end of the project. We are in contact with microscope manufacturers expressing interest in our innovation. Our lossless electron beam monochromator is expected to be a game-changer in all EM applications, in particular the semiconductor inspection and medicine development markets, where high-resolution SEMs are becoming increasingly popular.

Fields of science (EuroSciVoc)

Programme(s)

Topic(s)

Funding Scheme

HORIZON-ERC-POC - HORIZON ERC Proof of Concept Grants

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Call for proposal

(opens in new window) ERC-2022-POC2

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Host institution

TECHNION - ISRAEL INSTITUTE OF TECHNOLOGY
Net EU contribution
€ 150 000,00
Address
SENATE BUILDING TECHNION CITY
32000 Haifa
Israel
Activity type
Higher or Secondary Education Establishments
Links
Total cost
No data

Beneficiaries (1)