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Atomically thin semiconductors for complementary field effect transistors

Objective

Atomically thin body (ATB) semiconductors such as transition metal dichalcogenides (TMDs) hold tremendous promise for scaling modern electronics because their ultra-thin channel provides excellent gate electrostatics. Major semiconductor companies and international roadmaps for devices and systems have cited ATB TMDs for sub-1-nm semiconductor technologies beyond 2030.

ATOMS will focus on developing ultra-scaled complementary field effect transistors (CFETs) based on ATB semiconductors, offering a transformative approach to address the scaling challenges of current semiconductor technology. The project aims to create ultra-short channel CFETs by optimising electrical contacts, developing ideal dielectrics, and integrating multiple pristine interfaces into the CFET structure.

Key objectives are the development of clean van der Waals contacts for low contact resistance and high ON state current, fabrication of ideal semiconductor/dielectric interfaces for efficient switching, and novel engineering methods to tune the threshold voltages of both n- and p-type FETs. Additionally, the project will focus on synthesis of wafer scale monolayer TMDs, and seamless integration of all these components to achieve high-performance CFETs.

By employing industry compatible fabrication processes, the ATOMS project aims to advance these technologies toward practical applications in next generation low-power electronics. This will position CFETs based on ATB semiconductors as a foundational technology for future electronic devices.

Fields of science (EuroSciVoc)

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Programme(s)

Multi-annual funding programmes that define the EU’s priorities for research and innovation.

Topic(s)

Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.

Funding Scheme

Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.

HORIZON-ERC - HORIZON ERC Grants

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Call for proposal

Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.

(opens in new window) ERC-2025-STG

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Host institution

THE CHANCELLOR MASTERS AND SCHOLARS OF THE UNIVERSITY OF CAMBRIDGE
Net EU contribution

Net EU financial contribution. The sum of money that the participant receives, deducted by the EU contribution to its linked third party. It considers the distribution of the EU financial contribution between direct beneficiaries of the project and other types of participants, like third-party participants.

€ 1 936 780,00
Address
TRINITY LANE THE OLD SCHOOLS
CB2 1TN CAMBRIDGE
United Kingdom

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Region
East of England East Anglia Cambridgeshire CC
Activity type
Higher or Secondary Education Establishments
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Total cost

The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.

€ 1 936 780,00

Beneficiaries (1)

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