Objectif
The main objective of NANOS4 is a breakthrough in advanced micro- and nano-technologies for developing innovative metal-oxide gas sensing systems based on mesoscopic sensors. The sensors will be fabricated by nanoengineering techniques like vapour phase transport process crystal growth and other advanced techniques of preparation. Optical, ion and electron beam nanolithography will be a tool for selective removal of materials. The materials will be deposited as sensor arrays over micromachined semiconductor substrates with surfaces suitable for high-temperature growth of metal oxides. Beside the ambition of the project is to incorporate the arrays into miniaturised low-power-consumption gas sensing systems equipped with tiny micro-chambers operated in an active sampling mode as micro-reactors. The systems will operate with power-consumption budgets comparable to a single commercial thick-film gas sensing element, featuring at the same time superior gas distinction, drift compensation as well as self-test functionalities. The NANOS4 proposal is mainly driven by the following markets needs: innovative sub-system technology for increasing safety, comfort and economy of flying in large passenger aircrafts and in vehicles, early detection of smouldering fires, reliable and cost effective monitoring of environmental odour nuisances and workplace safety.
Champ scientifique
- engineering and technologymaterials engineeringcrystals
- natural scienceschemical sciencesinorganic chemistryinorganic compounds
- engineering and technologyenvironmental engineeringenergy and fuelsfossil energynatural gas
- engineering and technologymaterials engineeringcoating and films
- engineering and technologyelectrical engineering, electronic engineering, information engineeringelectronic engineeringsensors
Thème(s)
Appel à propositions
FP6-2002-NMP-1
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