Objective
- Development of fast and versatile fabrication processes for mould inserts by means of high aspect ratio dry etching of silicon and metals. The silicon moulds can be used for an electroplating process, resulting in metal mould inserts for production of microstructures by means of moulding and embossing. The aspect ratios to be expected are 10 to 20 typically at diameters in the range of microns with profile control for releasing the structures.
- Development of a rapid prototyping process for microstructures with IC accuracy by means of e-beam lithography, dry etching and embossing.
- Demonstration of the process by selecting a pilot customer and fabricating the customer specific microstructures. Within this pilot production, a reduction of assembly costs and time will be demonstrated.
A LIGA-like microsystem process to produce 3-dimensional microstructures with high aspect ratios will be developed. The development is based on an inexpensive fabrication process for microstructuring of different materials using high aspect ratio dry etching and reproduction in plastic microstructures with IC tolerances. Microassembly of the structures will also form part of the project. The technology will be suited for economical fast prototyping as well as production of certain products.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
44227 DORTMUND
Germany
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.