Objective
- Reduction of CoO through a reduced chemical and DI water consumption per processed wafer and an increased throughput.
- Increase of the product yield through the improvement of the quality of critical active dielectrics.
- Reduction of the environmental impact through the simplification of the cleaning cycle and the elimination of dangerous chemicals.
- Set-up and characterisation with critical applications of a HF point-of-use monitoring system with software active automatic intervention on process parameters.
- Feedback and experience on the implementation in a production environment of a new cleaning concept.
- Strong cooperation among industrial users.
As Flash Memory products are getting more and more complex, the processes needed to produce these devices are getting more detailed and critical, while manufacturing costs and environmental friendliness are a must at the same time.
To satisfy the above-mentioned requirements, the implementation in production of a new simplified cleaning concept (Twin Clean) with diluted chemistries and all the necessary hardware features to satisfy stringent process requirements (such as a HF concentration monitoring system) is the goal of the project.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
20041 Agrate Brianza
Italy
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.