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Gigascale Oriented Solid State flAsh Memory for EuRope

Project description

Next-Generation Nanoelectronics Components and Electronics Integration GOSSAMER successfully developed a fully integrated Flash NAND technology based on the TANOS concept, investigating a large number of architecture and material options. The project aimed at the development of the technology for very high density Non Volatile Memories for mass storage applications down to the 2X nm technology node. The field is receiving increasing attention, due to the explosion of portable multimedia applications, and is forecasted to exceed 40 Billion US$ total available market by 2010. The dominant technology for this application is the floating gate NAND memory. However severe technological roadblocks (reduction in storage charge and electrostatic interference among neighboring cells) are limiting further scaling beyond the 32 nm node. Charge trapping in dielectric layers seems to be a viable alternative to floating gate. The main challenge is the integration of the different new materials, like tunnel dielectric, trapping layer, top dielectric, metal gate at the target technology node and the achievement of an acceptable trade-off between functionality and reliability (e.g. charge retention and endurance). The project covered material development, cell architecture, modeling of material properties, trapping and conduction behavior in the dielectrics, metal gate materials. Initial studies were performed on available technology 65-45nm (more relaxed for Universities and research centers) to arrive to full process integration and realization of full arrays in a technology in the 28-36 nm range (the best achievable with available lithography) by two major European semiconductor manufacturers. It included memory characterization and reliability testing, with the additional aim of defining standards and procedures for reliability assessment. Technology options for higher integration densities, for a given lithography node, were investigated with the help of public research partners. Following the faster than expected evolution of the floating gate NAND Flash technology, it was decided to anticipate a demonstration of the feasibility of the technology on a large scale device in 45nm technology, and to focus the final demonstration on the proof of the scalability of the TANOS technology towards the 20nm generation.

Field of science

  • /natural sciences/chemical sciences/inorganic chemistry/metals

Call for proposal

FP7-ICT-2007-1
See other projects for this call

Funding Scheme

CP - Collaborative project (generic)

Coordinator

Numonyx Italy Srl
Address
Via Camillo Olivetti 2
20864 Agrate Brianza
Italy
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EU contribution
€ 2 809 402
Administrative Contact
Manuela Seminara (Dr.)

Participants (20)

ASM BELGIUM NV
Belgium
EU contribution
€ 403 064
Address
Kapeldreef 75
3001 Heverlee
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Cornelius Van der Jeugd (Mr)
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium
EU contribution
€ 2 411 695
Address
Kapeldreef 75
3001 Leuven
Activity type
Research Organisations
Administrative Contact
Hannelore Marain (Mrs.)
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Germany
EU contribution
€ 1 782 224
Address
Hansastrasse 27C
80686 Munchen
Activity type
Research Organisations
Administrative Contact
Andrea Zeumann (Ms)
QIMONDA DRESDEN GMBH & CO.OHG

Participation ended

Germany
EU contribution
€ 1 973 957
Address
Koenigsbruecker Strasse 180
01099 Dresden
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Uwe Poepping (-)
NAMLAB GGMBH
Germany
EU contribution
€ 0
Address
Nothnitzer Strasse 64 A
01187 Dresden
Activity type
Research Organisations
TECHNISCHE UNIVERSITAET BRAUNSCHWEIG
Germany
EU contribution
€ 352 440
Address
Universitaetsplatz 2
38106 Braunschweig
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Bernd Meinerzhagen (Prof.)
TECHNISCHE UNIVERSITAET BERGAKADEMIE FREIBERG

Participation ended

Germany
EU contribution
€ 368 560
Address
Akademiestrasse 6
09599 Freiberg
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Andreas Handschuh (Mr.)
ASM MICROCHEMISTRY OY
Finland
EU contribution
€ 170 268
Address
Vaino Auerin Katu 12 A
00560 Helsinki
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Marko Tuominen (Mr)
AYMING
France
EU contribution
€ 266 190
Address
185 Avenue Des Gresillons
92622 Gennevilliers Cedex
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Nicolas Marin (Mr)
UNIVERSITY COLLEGE CORK - NATIONAL UNIVERSITY OF IRELAND, CORK
Ireland
EU contribution
€ 283 858
Address
Western Road
T12 YN60 Cork
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Conor Delaney (Mr.)
BRUKER TECHNOLOGIES LTD
Israel
EU contribution
€ 404 308
Address
6 Hamechkar Street Ramat Gavriel Industrial Zone
2306990 Migdal Haemek
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
ORAN COLLINS (MR)
CONSIGLIO NAZIONALE DELLE RICERCHE
Italy
EU contribution
€ 440 002
Address
Piazzale Aldo Moro 7
00185 Roma
Activity type
Research Organisations
Administrative Contact
Barbara Cagnana (Dr.)
ACTIVE TECHNOLOGIES SRL
Italy
EU contribution
€ 337 506
Address
Via Bela Bartok 29/B
44124 Ferrara
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Piero Olivo (Prof.)
CONSORZIO NAZIONALE INTERUNIVERSITARIO PER LA NANOELETTRONICA
Italy
EU contribution
€ 962 002
Address
Via Toffano 2
40125 Bologna
Activity type
Research Organisations
Administrative Contact
Enrico Sangiorgi (Prof.)
ASM EUROPE BV
Netherlands
EU contribution
€ 133 354
Address
Versterkerstraat 8
1322 AP Almere
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Sebastiaan Van Nooten (Mr)
ASM INTERNATIONAL N.V.

Participation ended

Netherlands
EU contribution
€ 0
Address
Versterkerstraat 8
1322 AP Almere
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Sebastiaan van Nooten (Ir.)
UNIVERSITA DEGLI STUDI DI MODENA E REGGIO EMILIA
Italy
EU contribution
€ 0
Address
Via Universita 4
41121 Modena
Activity type
Higher or Secondary Education Establishments
POLITECNICO DI MILANO
Italy
EU contribution
€ 0
Address
Piazza Leonardo Da Vinci 32
20133 Milano
Activity type
Higher or Secondary Education Establishments
UNIVERSITA DEGLI STUDI DI UDINE
Italy
EU contribution
€ 0
Address
Via Palladio 8
33100 Udine
Activity type
Higher or Secondary Education Establishments
UNIVERSITA DEGLI STUDI DI FERRARA
Italy
EU contribution
€ 0
Address
Via Ariosto 35
44121 Ferrara
Activity type
Higher or Secondary Education Establishments