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Integrated resonant accelerometer microsystems for automotive applications

Objective

- Development of a 50g accelerometer sensor based on a bulk micromachined silicon resonator.

- Development of a 500g accelerometer sensor based on a bulk micromachined silicon resonator.

- Development of accompanying ASICs for integration with 50g accelerometer in a hybrid integrated microsystem for frontal impact airbag applications.

- Development of accompanying ASICs for integration with 500g accelerometer in a hybrid integrated microsystem for side impact airbag applications.

- Test and demonstration of the microsystems in the airbag application by Autoliv.

- Development and installation of the mass fabrication of silicon microsystems, glass-silicon-glass bonding, assembly and test.

A family of accelerometer microsystems will be developed for automotive applications based upon the following two types accelerometers.

- Crash sensors for frontal impacts and airbag applications range around 50g
- Crash sensors for side impacts and airbag applications range around 500g.

The project will focus on the development of key process technologies including assembly and testing, product designs and manufacture and test of functional prototypes in coordination with the establishment of high volume production capabilities.

Coordinator

Sensonor As
Address
Knutsrodveien 7
1392 Horten
Norway

Participants (2)

Autoliv
Germany
Address
Theodor-heuss-strasse 2
W-8060 Dachau
SINTEF
Norway
Address
Forskningsveien 1
0314 Oslo