Objective Access is offered to advanced micro- and nanotechnology device processing environments for microwave and photonic devices and for nanotechnology at the Department of Microtechnology and Nanoscience (MC2) at Chalmers University of Technology in Göteborg, Sweden. The laboratory provides means to develop process steps, process sequences, and components in small/medium quantities.In 1240m2 clean-room area more than 150 tools are available, including two e-beam lithography systems (one of which is a JBX 9300FS from JEOL with a spot diameter of 4nm and a minimum feature size of below 10nm), silicon processing on up to 150mm wafers, III-V and wide bandgap processing, molecular beam epitaxy, CVD and dry etching systems. Fields of science engineering and technologynanotechnologynatural scienceschemical sciencesinorganic chemistrymetalloidsengineering and technologyother engineering and technologiesmicrotechnology Keywords Nanotechnology Programme(s) FP6-INFRASTRUCTURES - Research infrastructures: Specific programme for research, technological development and demonstration: "Structuring the European Research Area" under the Sixth Framework Programme 2002-2006 Topic(s) INFRASTR-1 - Transnational access to major research infrastructures for research teams and individual researchers Call for proposal FP6-2004-INFRASTRUCTURES-5 See other projects for this call Funding Scheme Data not available Coordinator CHALMERS TEKNISKA HOEGSKOLA AB EU contribution No data Address Chalmersplatsen 4 GOETEBORG Sweden See on map Links Website Opens in new window Total cost No data
