Evaluation of frontside-application on SEZ spin etcher front master 203

Project Information

EFASEM

Grant agreement ID: 26414

Project closed

Start date 1 September 1997

End date 31 December 1998

Funded under

• Specific research and technological development programme in the field of information technologies, 1994-1998

Total cost € 3 399 800,00

EU contribution € 1 699 900,00

Coordinated by

Siemens Microelectronics Center Gmbh & Co. Org
Germany

Programme(s)

• FP4-ESPRIT 4 - Specific research and technological development programme in the field of information technologies, 1994-1998

Topic(s)

• 2.9 - Building blocks, methods & tools for semiconductor app&techs

Call for proposal

Data not available

Funding Scheme

ACM - Preparatory, accompanying and support measures

Coordinator

Siemens Microelectronics Center Gmbh & Co. Org

• EU contribution: No data
• Address: Koenigsbruecker Strasse 180 ; 01099 Dresden ; Germany
• Total cost: No data