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Content archived on 2024-06-18

Automated in-line Metrology for Nanoscale Production

Objective

Knowing the mechanical properties of workpieces and machine-tools also at the nanometer scale is an absolute necessity for an efficient nanoscale production. Current technologies are lacking the flexibility and robustness needed for measuring such key parameters as topography, morphology, roughness, adhesion, or micro- and nano-hardness directly in a production environment. This hinders rapid development cycles and resource efficient process and quality control. The following technology and methodology gaps for addressing these challenges were identified: Efficient disturbance rejection and systems stability; robustness and longevity of probes; short time to data (i.e. high-speed measurements and data handling); and traceability of the measurement.
The project aim4np strives at solving this problem by combining measuring techniques developed in nanoscience with novel control techniques from mechatronics and procedures from traceable metrology.

Goal and Deliverable
The main deliverable will be a fast robotic metrology platform and operational procedures for measuring with nanometer resolution and in a traceable way the topography, morphology, roughness, micro- and nano-hardness, and adhesive properties of large samples in a production environment.

Call for proposal

FP7-NMP-2012-SME-6
See other projects for this call

Coordinator

TECHNISCHE UNIVERSITEIT DELFT
EU contribution
€ 601 813,65
Address
STEVINWEG 1
2628 CN Delft
Netherlands

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Region
West-Nederland Zuid-Holland Delft en Westland
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Karin De Wolde (Mrs.)
Links
Total cost
No data

Participants (13)