Objective
Micro sensor and micro actuator technologies are of strategic importance for the EU. In particular, the association of silicon micro machining with integrated optics (IO) have the advantage of small scale, easy integration and appropriate size to control or manipulate optical radiations. It can result in the production of miniaturised, low cost and smart optical micro sensors with moving parts. This technology is therefore suitable to fabricate precision-defined optical components and offers relative easy alignment procedures of optical with mechanical parts. With the support of GROWTH programme (proposal "OCMMM" G1RD-ct-2000-00261, Jan. 2001) we proposed the development of an innovative on-chip testing technology for in site metrology of MicroElectroMechanical Systems (MEMS). This is based on in-site optical interrogation of mechanical parameters by incorporating a sensing arm of an integrated Mach-Sender interferometer into actuated MEMS structures. In this case the micro interferometer cannot be reused for other systems. The alternative is the combination of previously developed opt-mechanical technology with fibber-optic and micro actuator technology. Optical micro sensors, based on phase-modulated detection, can provide high resolution measuring. Thus, the present proposal is an accompanying measure for OCMMM proposal aiming the realisation of a low-cost ex-site optical micrometer, based on an integrated Michel son interferometer with two reference arms and one sensing arm. Each of them connected to an optical fibber. Electrostatic ally driven mirror creates a phase modulation between both the reference arms of the interferometer. The research project couples the distributed potential of both Applicant and Host Organisations. Applicant task will be the design, realisation and testing of proposed electrostatic ally heterodyned optical micrometer. By strong contacts with Sees, the project offers the opportunity to make research in the context of industry requirements.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- engineering and technology mechanical engineering manufacturing engineering subtractive manufacturing
- engineering and technology electrical engineering, electronic engineering, information engineering electronic engineering sensors
- natural sciences physical sciences optics
- natural sciences chemical sciences inorganic chemistry metalloids
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Keywords
Project’s keywords as indicated by the project coordinator. Not to be confused with the EuroSciVoc taxonomy (Fields of science)
Project’s keywords as indicated by the project coordinator. Not to be confused with the EuroSciVoc taxonomy (Fields of science)
Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
FP6-2002-MOBILITY-5
See other projects for this call
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
BESANCON
France
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.