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Implementing and calibration of integrated optical strategy for ex situ vibrometry of Micro-Electro-Mechanical Systems


Micro sensor and micro actuator technologies are of strategic importance for the EU. In particular, the association of silicon micro machining with integrated optics (IO) have the advantage of small scale, easy integration and appropriate size to control or manipulate optical radiations. It can result in the production of miniaturised, low cost and smart optical micro sensors with moving parts. This technology is therefore suitable to fabricate precision-defined optical components and offers relative easy alignment procedures of optical with mechanical parts. With the support of GROWTH programme (proposal "OCMMM" G1RD-ct-2000-00261, Jan. 2001) we proposed the development of an innovative on-chip testing technology for in site metrology of MicroElectroMechanical Systems (MEMS). This is based on in-site optical interrogation of mechanical parameters by incorporating a sensing arm of an integrated Mach-Sender interferometer into actuated MEMS structures. In this case the micro interferometer cannot be reused for other systems. The alternative is the combination of previously developed opt-mechanical technology with fibber-optic and micro actuator technology. Optical micro sensors, based on phase-modulated detection, can provide high resolution measuring. Thus, the present proposal is an accompanying measure for OCMMM proposal aiming the realisation of a low-cost ex-site optical micrometer, based on an integrated Michel son interferometer with two reference arms and one sensing arm. Each of them connected to an optical fibber. Electrostatic ally driven mirror creates a phase modulation between both the reference arms of the interferometer. The research project couples the distributed potential of both Applicant and Host Organisations. Applicant task will be the design, realisation and testing of proposed electrostatic ally heterodyned optical micrometer. By strong contacts with Sees, the project offers the opportunity to make research in the context of industry requirements.

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Rue Claude Goudimel 1

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