Objective
The overall objective of this 3-year project is to develop a CMOS-compatible industrial process for the fabrication of field effect transistors based on carbon nanotubes (CNT-FETs). In order to solve the CNT manipulation and placement problems, two approaches based on template growth in engineered porous structures will be investigated. In the first one, CNTs will be grown inside porous alumina templates obtained by anodic oxidation of Al films.
The originality of the method is that the pores are synthesised parallel to the surface of the substrate (instead of perpendicular as usual) which will greatly ease the contacting operations for the source, drain and gate electrodes of the CNT-FETs with large numbers of CNTs connected in parallel. In the second approach, CNTs will be grown in vertical pore structures obtained by nanolithography and reactive ion etching. In both cases, the catalyst particles (necessary for the nucleation and growth of CNTs at low to medium temperature) will be electrodeposited at the bottom of the pores prior to chemical vapour deposition growth of the CNTs.
As the catalyst particles are confined inside the pores, high temperature surface diffusion is prevented during (or before) growth and the nanometric size of the particles is preserved, leading to uniform CNT diameters. Moreover, by using monocrystalline films or substrates at the bottom of the pores, we propose to deposit the catalyst particles in an epitaxial-type mode, which will lead to a perfectly controlled structure likely to induce chirality control for the CNTs. This point is of paramount importance for the future of CNT-based electronics. The project brings together 4 European partners with complementary skills, from 3 different countries. If the proposed approach is successful, only Europe would have the critical size to set up new standards and industrial practices for CNT-based electronics. It is therefore essential that such research is carried out at European level.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences chemical sciences electrochemistry electrolysis
- natural sciences chemical sciences catalysis
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Keywords
Project’s keywords as indicated by the project coordinator. Not to be confused with the EuroSciVoc taxonomy (Fields of science)
Project’s keywords as indicated by the project coordinator. Not to be confused with the EuroSciVoc taxonomy (Fields of science)
Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
75794 PARIS
France
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.