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Content archived on 2024-05-29

Technology for the production of massively parallel intelligent cantilever - probe platforms for nanoscale analysis and synthesis

Objective

Scanning proximity probes (SPP) are uniquely powerful tools for analysis, manipulation and bottom-up synthesis: they are capable of addressing and engineering surfaces at the atomic level and are the key to unlocking the full potential of Nanotechnology. C urrent SPP nanotools are limited to single probes with pitifully slow processing rates and, even at the research level, attempts at multiprobe systems have achieved only a 32x32 array. This could be a terminal limitation for the future of Nanotechnology, i n particular for bottom-up manufacturing, with little prospect for economic throughputs, unless 2-dim. massively parallel probe arrays can be realised. Such a development would revolutionise Nanotechnology, triggering an avalanche of new products and proce sses in a wide range of applications including surface chemistry, materials and the life-health industries. This ground-breaking technology development is the ambitious principal aim of this proposal. Generic massively parallel intelligent cantilever-probe platforms will be produced through a number of techniques. The ultimate product will be, packaged VLSI NEMS-chip incorporating 128x128 proximal probes, fully addressable with control and readout interconnects and advanced software. To validate this novel technology, a series of demonstrations are planned where relevant SMEs will use this technology to carry out sub-10 nm metrology for high throughput manufacturing. Furthermore selected key applications and the results will be used to educate and inform in support of the development of new nanotechnology processes and products. It is the aim of PRONANO that the new massively parallel SPP nanotools with VLSI ASNEMS chips inside should empower nanotechnologists and drive the rapid development of nanoscienc e, leading to new nanotechnology processes and their industrial exploitation. They will secure the future of nanotechnology with economic throughputs leading to new manufacturing industries.

Fields of science (EuroSciVoc)

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Keywords

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Topic(s)

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Call for proposal

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FP6-2003-NMP-NI-3
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Funding Scheme

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IP - Integrated Project

Coordinator

NANOWORLD SERVICES GMBH
EU contribution
No data
Total cost

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Participants (18)

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