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Sensor based adaptive laser micromachining using ultrashort pulse lasers for zero-failure manufacturing

CORDIS provides links to public deliverables and publications of HORIZON projects.

Links to deliverables and publications from FP7 projects, as well as links to some specific result types such as dataset and software, are dynamically retrieved from OpenAIRE .

Deliverables

D 2.4 (opens in new window)

Process optimized high NA scanning objective

D 2.6 (opens in new window)

External measurement head for high lateral resolution

D 2.3 (opens in new window)

Active alignment unit for beam coupling and sensor integration based on adaptive optics

D 2.2 (opens in new window)

Automatic adjustable reference path system

D 6.4 (opens in new window)

Adaptive laser process for selective defect removal

D 7.4 (opens in new window)

Adaptive laser process development for shape and feature detection and texture machining

D 2.1 (opens in new window)

First generation - Inline measurement system

D 2.7 (opens in new window)

Second generation Inline measurement system

Publications

Work in progress: Smart Micromachining – Sensor-based adaptive laser machining using ultrashort-pulse lasers

Author(s): Guilherme Mallmann (IPT); Kevin Voss (DEMCON), Steffen Resink and Albert Borreman(Focal)
Published in: Mikroniek, Issue 4, 2015, Page(s) 5-11, ISSN 0026-3699
Publisher: DSPE

Inline surface topography measurements of ultrashort laser pulsed manufactured micro structures based on low coherence interferometry (opens in new window)

Author(s): Rouwen Kunze, Robert Schmitt
Published in: tm - Technisches Messen, Issue 84/9, 2017, Page(s) 575-586, ISSN 0171-8096
Publisher: Oldenbourg Wissenschaftsverlag GmbH
DOI: 10.1515/teme-2016-0074

Signalverarbeitung zur Inline-Prozessüberwachung für koaxial integrierte Messtechnik in der Lasermikrostrukturierung (opens in new window)

Author(s): Rouwen Kunze, Philipp Bredol, Robert Schmitt
Published in: at - Automatisierungstechnik, Issue 65/6, 2017, Page(s) 416-425, ISSN 0178-2312
Publisher: Oldenbourg Wissenschaftsverlag GmbH
DOI: 10.1515/auto-2017-0011

sensor based adaptive laser micromachining

Author(s): A. Borreman, L.A. Woldering , E.J. de Hoon, G. Folkersma, M. Groenendijk, R. Kunze, M. Zenz
Published in: Proceedings of the 4th dspe conference, Issue 4th, 2018
Publisher: DSPE

Monitoring of laser material processing using machine integrated low-coherence interferometry (opens in new window)

Author(s): Rouwen Kunze, Robert Schmitt, Niels König
Published in: Fifth International Conference on Optical and Photonics Engineering, 2017, Page(s) 109, ISBN 9781-510613737
Publisher: SPIE
DOI: 10.1117/12.2270896

High-resolution, high-speed inline optical topography measurement system for laser micro-machining process control

Author(s): Folkersma, K.G.P.; Woldering, L.A.; Voss, K.H.J.; Pohl, R.; Resink, S.G.; Kunze, Rouwen; Schmitt, Robert; Klein, M.E.; Borreman, A.; de Hoon, C.J.A.
Published in: 2017
Publisher: Various

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