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Sensor based adaptive laser micromachining using ultrashort pulse lasers for zero-failure manufacturing

Deliverables

D 2.4

Process optimized high NA scanning objective

D 2.6

External measurement head for high lateral resolution

D 2.3

Active alignment unit for beam coupling and sensor integration based on adaptive optics

D 2.2

Automatic adjustable reference path system

D 6.4

Adaptive laser process for selective defect removal

D 7.4

Adaptive laser process development for shape and feature detection and texture machining

D 2.1

First generation - Inline measurement system

D 2.7

Second generation Inline measurement system

D 8.3

First version of the business model

D 8.6

Dissemination plan

Revision of the automatic point cloud analysis software and evaluation with real use case parts

Description of the automatic point cloud analysis software for real use case parts

D 8.5

Final version of the business model

D 8.1

Dissemination plan

D 8.4

Dissemination plan

D 5.4

Assessment Report of Demonstrator

D 8.2

Dissemination plan

Revision of the automatic point cloud analysis software for defect detection and evaluation with real data

Description of the automatic point cloud analysis software

Publications

Work in progress: Smart Micromachining – Sensor-based adaptive laser machining using ultrashort-pulse lasers

Author(s): Guilherme Mallmann (IPT); Kevin Voss (DEMCON), Steffen Resink and Albert Borreman(Focal)
Published in: Mikroniek, Issue 4, 2015, Page(s) 5-11, ISSN 0026-3699
Publisher: DSPE

Inline surface topography measurements of ultrashort laser pulsed manufactured micro structures based on low coherence interferometry

Author(s): Rouwen Kunze, Robert Schmitt
Published in: tm - Technisches Messen, Issue 84/9, 2017, Page(s) 575-586, ISSN 0171-8096
Publisher: Oldenbourg Wissenschaftsverlag GmbH
DOI: 10.1515/teme-2016-0074

Signalverarbeitung zur Inline-Prozessüberwachung für koaxial integrierte Messtechnik in der Lasermikrostrukturierung

Author(s): Rouwen Kunze, Philipp Bredol, Robert Schmitt
Published in: at - Automatisierungstechnik, Issue 65/6, 2017, Page(s) 416-425, ISSN 0178-2312
Publisher: Oldenbourg Wissenschaftsverlag GmbH
DOI: 10.1515/auto-2017-0011

sensor based adaptive laser micromachining

Author(s): A. Borreman, L.A. Woldering , E.J. de Hoon, G. Folkersma, M. Groenendijk, R. Kunze, M. Zenz
Published in: Proceedings of the 4th dspe conference, Issue 4th, 2018
Publisher: DSPE

Monitoring of laser material processing using machine integrated low-coherence interferometry

Author(s): Rouwen Kunze, Robert Schmitt, Niels König
Published in: Fifth International Conference on Optical and Photonics Engineering, 2017, Page(s) 109, ISBN 9781-510613737
Publisher: SPIE
DOI: 10.1117/12.2270896

High-resolution, high-speed inline optical topography measurement system for laser micro-machining process control

Author(s): Folkersma, K.G.P.; Woldering, L.A.; Voss, K.H.J.; Pohl, R.; Resink, S.G.; Kunze, Rouwen; Schmitt, Robert; Klein, M.E.; Borreman, A.; de Hoon, C.J.A.
Published in: 2017
Publisher: Various

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