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In-Line Areal Surface Measurement for Micro and Nano Production

Objectif

A new optical interferometry technology has been developed which delivers fast and high precision areal surface measurements for stepped and structured micro-nanoscale surfaces which cannot be measured by traditional techniques. The technology addresses the market need for high throughput, simple sample preparation and nanoscale accuracy combined with an affordable system cost. Furthermore, a unique vibration isolation innovation means that it has the flexibility to be applied both in-line and in-process. This project aims to validate its commercial potential as both a research and industrial metrology tool.

Appel à propositions

H2020-SMEInst-2014-2015

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Sous appel

H2020-SMEINST-1-2014

Régime de financement

SME-1 - SME instrument phase 1

Coordinateur

IBS PRECISION ENGINEERING BV
Contribution nette de l'UE
€ 50 000,00
Adresse
Esp 201
5633AD Eindhoven
Pays-Bas

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PME

L’entreprise s’est définie comme une PME (petite et moyenne entreprise) au moment de la signature de la convention de subvention.

Oui
Région
Zuid-Nederland Noord-Brabant Zuidoost-Noord-Brabant
Type d’activité
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Liens
Coût total
€ 71 429,00