Résultats exploitables
With the increase of automation and the precision of control processes, torque sensing becomes rapidly an essential feature for many areas. Existing solutions like strain gauges suffer from limited robustness, critical attachment procedures and cost level. With the new approach these demands are widely covered and excellent business opportunities are given in the fields of process control, tool machining, electrical drives, automotive applications and power generation.
The key result of this project in technological terms represents the substitution of strain gauges for industrial torque and force measurement by a new approach, which is based on silicon micromechanics. The main benefits of these results which respect to existing solutions consist of an easy application, a high overload and sensitivity and a nearly unlimited load cycle as well. Currently the result is used by Siemens to measure the torque in rolling mills for control purpose. Another advantage, which is for this application very relevant, is given by the simple attachment on existing shafts in the field. The technical progress is mainly based on a capacity enhancing comb structure, which is established by silicon micromechanics or other precise manufacturing process. On this comb structure the torsion of a shaft is introduced via elastic and hermetic packaging and changes the capacitance by nearly 50 % under full load. The attachment on a shaft can be easily done by screws or welding. Wireless signal transmission can be executed by various existing methods.
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