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Advanced Developments for 0.25 micron CMOS Technologies

Objective

The aim of ADEQUAT is to develop the basic process steps and process modules for future 0.35 micron and 0.25 micron CMOS technologies for logic applications.

The project will concentrate on the early development and demonstration of the feasibility of the individual process modules for 0.25 micron CMOS technology. In the first phase, this effort will be carried out in the framework of 0.35 micron lithography, and the feasibility of major process steps will be demonstrated by the fourth quarter of the first year of the project. This will lead to the optimisation and stabilisation of advanced 0.35 micron modules in a 0.5 micron CMOS technology by the end of the project. The possible benefits resulting from the new modules (eg in terms of performance enhancement, process margin or process control improvement or better productivity) will be analysed and reported, which will lead to individual decisions on the process module transfer by the manufacturers.

In parallel, work will be done on modelling and understanding deep sub-micron failure mechanisms and on advanced local analysis and 2-D profiling in relation to advanced process and device modelling.

A work-plan for a second phase will propose the extension into the 0.25 micron regime, leading to the stabilisation of 0.25 micron modules in a 0.35 micron environment and work on 0.35 microns back-end modules.

The Joint Logic Project (JLP, 7363), in which all the major European IC manufacturers have joined forces, will be the main beneficiary of ADEQUAT's results. Furthermore, all the industrial partners will transfer know-how and exploit ADEQUAT modules in their pilot line environment for the development of CMOS logic production processes.

For further information, see project 8002, which describes in more detail the first and second phases of ADEQUAT.

Coordinator

Interuniversitair Mikroelektronica Centrum
Address
Kapeldreef 75
3030 Heverlee
Belgium

Participants (20)

CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
France
Address
Avenue Des Martyrs 25
38042 Grenoble
Centre National de la Recherche Scientifique (CNRS)
France
Address
15 Quai Anatole France
75700 Paris
Centre National de la Recherche Scientifique (CNRS)
France
Address
7 Avenue De Colonel Roche
31077 Toulouse
Consiglio Nazionale delle Ricerche (CNR)
Italy
Address
Via De' Castagnoli 1
40126 Bologna
Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung eV (FhG)
Germany
Address
Paul-gerhardt-allee 42
81245 München
GEC Plessey Semiconductors plc
United Kingdom
Address
Cheney Manor
SN2 2QW Swindon
Grenoble Silicium Submicronique
France
Address
Centre D'étude De Grenoble Avenue Des Martyrs
38041 Grenoble
NATIONAL RESEARCH CENTRE FOR SCIENTIFIC RESEARCH DEMOKRITOS
Greece
Address
Aghia Paraskevi, 60228
15310 Athenes
PHILIPS CONSUMER ELECTRONICS BV
Netherlands
Address
Pastoor Petersstr., 10-16, 218
5600 MD Eindhoven
SGS THOMSON MICROELECTRONICS SA
France
Address
7 Avenue Gallieni
92253 Gentilly
SIEMENS - AUSTRIA
Austria
Address
Schoenbrunnerstrasse, 61
1050 Wien
Siemens AG
Germany
Address
Otto-hahn-ring 6
81739 München
TECHNISCHE UNIVERSITAT WIEN-IAIS
Austria
Address
Paniglglasse, 16
1040 Wien
TECHNISCHE UNIVERSITEIT DELFT
Netherlands
Address
Feldmannweg 17, 5053
2600 GB Delft
TECHNISCHE UNIVERSITEIT EINDHOVEN
Netherlands
Address
, 513
5600 MB Eindhoven
Thomson Microelectronics Srl (SGS)
Italy
Address
Via Carlo Olivetti
20041 Agrate Brianza Milano
Università degli Studi di Bologna
Italy
Address
Viale Risorgimento 2
40136 Bologna
Università degli Studi di Parma
Italy
Address
Viale Delle Scienze
43100 Parma
Università degli Studi di Pisa
Italy
Address
Lungarno Pacinotti 43
56100 Pisa
Warwick Strategic Technologies
United Kingdom
Address
Barclays Venture Centre Warwick Science Park
CV4 7EZ Coventry