Objective The aim of ADEQUAT is to develop the basic process steps and process modules for future 0.35 micron and 0.25 micron CMOS technologies for logic applications. The project will concentrate on the early development and demonstration of the feasibility of the individual process modules for 0.25 micron CMOS technology. In the first phase, this effort will be carried out in the framework of 0.35 micron lithography, and the feasibility of major process steps will be demonstrated by the fourth quarter of the first year of the project. This will lead to the optimisation and stabilisation of advanced 0.35 micron modules in a 0.5 micron CMOS technology by the end of the project. The possible benefits resulting from the new modules (eg in terms of performance enhancement, process margin or process control improvement or better productivity) will be analysed and reported, which will lead to individual decisions on the process module transfer by the manufacturers. In parallel, work will be done on modelling and understanding deep sub-micron failure mechanisms and on advanced local analysis and 2-D profiling in relation to advanced process and device modelling. A work-plan for a second phase will propose the extension into the 0.25 micron regime, leading to the stabilisation of 0.25 micron modules in a 0.35 micron environment and work on 0.35 microns back-end modules. The Joint Logic Project (JLP, 7363), in which all the major European IC manufacturers have joined forces, will be the main beneficiary of ADEQUAT's results. Furthermore, all the industrial partners will transfer know-how and exploit ADEQUAT modules in their pilot line environment for the development of CMOS logic production processes. For further information, see project 8002, which describes in more detail the first and second phases of ADEQUAT. Fields of science social scienceseconomics and businesseconomicsproduction economicsproductivity Programme(s) FP3-ESPRIT 3 - Specific research and technological development programme (EEC) in the field of information technologies, 1990-1994 Topic(s) Data not available Call for proposal Data not available Funding Scheme Data not available Coordinator Interuniversitair Mikroelektronica Centrum Address Kapeldreef 75 3030 Heverlee Belgium See on map EU contribution € 0,00 Participants (20) Sort alphabetically Sort by EU Contribution Expand all Collapse all CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE France EU contribution € 0,00 Address Avenue des martyrs 25 38042 Grenoble See on map Centre National de la Recherche Scientifique (CNRS) France EU contribution € 0,00 Address 15 quai anatole france 75700 Paris See on map Centre National de la Recherche Scientifique (CNRS) France EU contribution € 0,00 Address 7 avenue de colonel roche 31077 Toulouse See on map Consiglio Nazionale delle Ricerche (CNR) Italy EU contribution € 0,00 Address Via de' castagnoli 1 40126 Bologna See on map Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung eV (FhG) Germany EU contribution € 0,00 Address Paul-gerhardt-allee 42 81245 München See on map GEC Plessey Semiconductors plc United Kingdom EU contribution € 0,00 Address Cheney manor SN2 2QW Swindon See on map Grenoble Silicium Submicronique France EU contribution € 0,00 Address Centre d'étude de grenoble avenue des martyrs 38041 Grenoble See on map NATIONAL RESEARCH CENTRE FOR SCIENTIFIC RESEARCH DEMOKRITOS Greece EU contribution € 0,00 Address Aghia paraskevi, 60228 15310 Athenes See on map PHILIPS CONSUMER ELECTRONICS BV Netherlands EU contribution € 0,00 Address Pastoor petersstr., 10-16, 218 5600 MD Eindhoven See on map SGS THOMSON MICROELECTRONICS SA France EU contribution € 0,00 Address 7 avenue gallieni 92253 Gentilly See on map SIEMENS - AUSTRIA Austria EU contribution € 0,00 Address Schoenbrunnerstrasse, 61 1050 Wien See on map Siemens AG Germany EU contribution € 0,00 Address Otto-hahn-ring 6 81739 München See on map TECHNISCHE UNIVERSITAT WIEN-IAIS Austria EU contribution € 0,00 Address Paniglglasse, 16 1040 Wien See on map TECHNISCHE UNIVERSITEIT DELFT Netherlands EU contribution € 0,00 Address Feldmannweg 17, 5053 2600 GB Delft See on map TECHNISCHE UNIVERSITEIT EINDHOVEN Netherlands EU contribution € 0,00 Address , 513 5600 MB Eindhoven See on map Thomson Microelectronics Srl (SGS) Italy EU contribution € 0,00 Address Via carlo olivetti 20041 Agrate brianza milano See on map Università degli Studi di Bologna Italy EU contribution € 0,00 Address Viale risorgimento 2 40136 Bologna See on map Università degli Studi di Parma Italy EU contribution € 0,00 Address Viale delle scienze 43100 Parma See on map Università degli Studi di Pisa Italy EU contribution € 0,00 Address Lungarno pacinotti 43 56100 Pisa See on map Warwick Strategic Technologies United Kingdom EU contribution € 0,00 Address Barclays venture centre warwick science park CV4 7EZ Coventry See on map
