Advanced Developments for 0.25 micron CMOS Technologies

Objective

The aim of ADEQUAT is to develop the basic process steps and process modules for future 0.35 micron and 0.25 micron CMOS technologies for logic applications.

The project will concentrate on the early development and demonstration of the feasibility of the individual process modules for 0.25 micron CMOS technology. In the first phase, this effort will be carried out in the framework of 0.35 micron lithography, and the feasibility of major process steps will be demonstrated by the fourth quarter of the first year of the project. This will lead to the optimisation and stabilisation of advanced 0.35 micron modules in a 0.5 micron CMOS technology by the end of the project. The possible benefits resulting from the new modules (eg in terms of performance enhancement, process margin or process control improvement or better productivity) will be analysed and reported, which will lead to individual decisions on the process module transfer by the manufacturers.

In parallel, work will be done on modelling and understanding deep sub-micron failure mechanisms and on advanced local analysis and 2-D profiling in relation to advanced process and device modelling.

A work-plan for a second phase will propose the extension into the 0.25 micron regime, leading to the stabilisation of 0.25 micron modules in a 0.35 micron environment and work on 0.35 microns back-end modules.

The Joint Logic Project (JLP, 7363), in which all the major European IC manufacturers have joined forces, will be the main beneficiary of ADEQUAT's results. Furthermore, all the industrial partners will transfer know-how and exploit ADEQUAT modules in their pilot line environment for the development of CMOS logic production processes.

For further information, see project 8002, which describes in more detail the first and second phases of ADEQUAT.

Programme(s)

• FP3-ESPRIT 3 - Specific research and technological development programme (EEC) in the field of information technologies, 1990-1994

Coordinator

Interuniversitair Mikroelektronica Centrum

Address

Kapeldreef 75
3030 Heverlee
Belgium

Participants (20)

CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE

France

Address

Avenue Des Martyrs 25
38042 Grenoble

Centre National de la Recherche Scientifique (CNRS)

France

Address

15 Quai Anatole France
75700 Paris

Centre National de la Recherche Scientifique (CNRS)

France

Address

7 Avenue De Colonel Roche
31077 Toulouse

Consiglio Nazionale delle Ricerche (CNR)

Italy

Address

Via De' Castagnoli 1
40126 Bologna

Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung eV (FhG)

Germany

Address

Paul-gerhardt-allee 42
81245 München

GEC Plessey Semiconductors plc

United Kingdom

Address

Cheney Manor
SN2 2QW Swindon

Grenoble Silicium Submicronique

France

Address

Centre D'étude De Grenoble Avenue Des Martyrs
38041 Grenoble

NATIONAL RESEARCH CENTRE FOR SCIENTIFIC RESEARCH DEMOKRITOS

Greece

Address

Aghia Paraskevi, 60228
15310 Athenes

PHILIPS CONSUMER ELECTRONICS BV

Netherlands

Address

Pastoor Petersstr., 10-16, 218
5600 MD Eindhoven

SGS THOMSON MICROELECTRONICS SA

France

Address

7 Avenue Gallieni
92253 Gentilly

SIEMENS - AUSTRIA

Austria

Address

Schoenbrunnerstrasse, 61
1050 Wien

Siemens AG

Germany

Address

Otto-hahn-ring 6
81739 München

TECHNISCHE UNIVERSITAT WIEN-IAIS

Austria

Address

Paniglglasse, 16
1040 Wien

TECHNISCHE UNIVERSITEIT DELFT

Netherlands

Address

Feldmannweg 17, 5053
2600 GB Delft

TECHNISCHE UNIVERSITEIT EINDHOVEN

Netherlands

Address

, 513
5600 MB Eindhoven

Thomson Microelectronics Srl (SGS)

Italy

Address

Via Carlo Olivetti
20041 Agrate Brianza Milano

Università degli Studi di Bologna

Italy

Address

Viale Risorgimento 2
40136 Bologna

Università degli Studi di Parma

Italy

Address

Viale Delle Scienze
43100 Parma

Università degli Studi di Pisa

Italy

Address

Lungarno Pacinotti 43
56100 Pisa

Warwick Strategic Technologies

United Kingdom

Address

Barclays Venture Centre Warwick Science Park
CV4 7EZ Coventry