Project description
Developing sustainable nanosized sensor devices
Piezoelectrics are used in everyday applications ranging from inkjet printers to ultrasound generators. They are the key elements of motion sensors and resonators found in wireless network sensor nodes. Unfortunately, the rising production of piezoelectrics is unsustainable. To solve this problem, the EU-funded SENSiSOFT project aims to develop nanosized piezoelectric devices with an unusual limit for wireless mechanical sensors. It will achieve this through the direct and combined chemical integration of nanostructured quartz, perovskite and hollandite materials on silicon. The project will open the way to the sustainable production of abundant, harmless and cost-effective on-chip piezoelectric oxide-based sensing devices.
Objective
Piezoelectrics are the active elements of many everyday applications, from ink-jet printers to ultrasound generators, representing a billion euro industry. They are the key elements of motion sensors and resonators present in any wireless network sensor (WNS) node. However, an increased production of piezoelectrics in a sustainable way is to-date a milestone. SENSiSOFT proposes to come up with materials that can provide a solution to this problem: piezoelectric materials that are abundant, cheap and harmless. The aim of this project is to produce new piezoelectric devices of nanometer size with an unusual limit for wireless mechanical sensors, using direct and combined chemical integration of quartz, perovskite and hollandites materials as nanostructured epitaxial thin films on silicon. This is a major challenge that demands bridging the gap between soft-chemistry and microfabrication techniques. Three strategies are proposed for this goal:
i) Implement a soft chemistry unified, monolithic process that will allow integrating epitaxial quartz, hollandite and perovskite oxide thin layers on silicon substrate with high piezoelectric response.
ii) Nanostructuration of piezoelectric epitaxial oxide thin films into controllable morphologies or nanostructures, in particular porous structure and 1D nanowires or nanorods, allowing excellent properties of oxides to be exploited to the fullest, mainly by avoiding clamping and improving its sensitivity.
iii) Fabrication of nanostructured SAW resonator-based and a LAMB-WAVE multisensor for monitoring mechanical parameters (mass, forces, pressure…). We will use MEMs technology in order to be able to define resonating structures (plates, membranes, bridges…) by silicon micromachining.
So, SENSiSOFT presents three innovative strategies to develop sensor devices capable to answer the metrology demand, with a detection threshold 10 to 100 times more sensitive resulting from a 1D and 2D configuration of novel piezoelectric oxides.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- engineering and technology electrical engineering, electronic engineering, information engineering electronic engineering sensors
- natural sciences chemical sciences inorganic chemistry metalloids
- engineering and technology electrical engineering, electronic engineering, information engineering electrical engineering piezoelectrics
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Keywords
Project’s keywords as indicated by the project coordinator. Not to be confused with the EuroSciVoc taxonomy (Fields of science)
Project’s keywords as indicated by the project coordinator. Not to be confused with the EuroSciVoc taxonomy (Fields of science)
Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
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H2020-EU.1.1. - EXCELLENT SCIENCE - European Research Council (ERC)
MAIN PROGRAMME
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Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
ERC-STG - Starting Grant
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Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
(opens in new window) ERC-2018-STG
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Net EU financial contribution. The sum of money that the participant receives, deducted by the EU contribution to its linked third party. It considers the distribution of the EU financial contribution between direct beneficiaries of the project and other types of participants, like third-party participants.
75794 PARIS
France
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.