Nanoscale cathodoluminescence (CL) microscopy is a unique materials metrology technique that holds much promise for widespread use, provided it becomes more accessible in terms of cost, throughput, and ease of operation. The current technology requires a large, dedicated laboratory space with special infrastructure and an expensive SEM (at least 400k€). Furthermore, systems are complex to operate and slow in throughput. In the TOPCL ERC POC project the Dutch NWO institute AMOLF and Dutch high-tech microscopy SME Delmic set out to resolve these bottlenecks by developing an easy-to-use, affordable, high-throughput table-top instrument for micro and nanoscale materials analysis using cathodoluminescence spectroscopy (CL).
In the project we have worked out three concepts for CL detection in a Phenom XL table-top SEM: 1) a low numerical aperture fiber-based CL detection system, 2) a high numerical-aperture paraboloid-mirror based CL detection system, and 3) a CL intensity detector mounted directly in the vacuum chamber. The fiber-based POC system has been fully designed, assembled, and tested on a variety of relevant samples. The mirror-based approach has been fully designed and all parts have been procured. Assembly and testing for this system are still in progress. In parallel, we have performed a first feasibility assessment for the direct integration of a multi-pixel photon counter (MPPC) in the vacuum chamber for simple CL intensity mapping. Each of the 3 POC table-top CL designs have potential to be commercialized and there is interest to do so and to carry on with the project. Through the distribution channels of Delmic first contacts have been made to potential customers to start generating interest and to get further input on how to proceed with the commercialization of the table-top CL system(s).
If brought to market, the systems can be employed for research and inspection of optoelectronic devices such as solar cells and LEDs, phosphors ang geological materials to name a few examples. Furthermore, the potential IP, tax-revenues, and employment associated with this commercialization could all benefit European society.
