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MOde-localized mass Sensors with Thermal Actuation and Piezoresistive DEtection


A fast-startup self-sustained thermal-piezoresistive oscillator with >106 effective quality factor in the air

Author(s): Hemin Zhang, Aojie Quan, Chenxi Wang, Linlin Wang, Chen Wang and M. Kraft
Published in: 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), 2022
Publisher: IEEE
DOI: 10.1109/mems51670.2022.9699711

A Thermal-Piezoresistive Self-Sustained Resonant Mass Sensor with High-Q (>95k) in Air

Author(s): Aojie Quan, Chen Wang, Hemin Zhang, Michel De Cooman, Chenxi Wang, Linlin Wang, Sina Sadeghpour, Michael Kraft
Published in: 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2021, Page(s) 168-171, ISBN 978-1-6654-1267-4
Publisher: IEEE
DOI: 10.1109/transducers50396.2021.9495471

On the Dynamic Range and Resolution of Thermal-Piezoresistive Resonant Mass Sensors

Author(s): Hemin Zhang , Aojie Quan, Chen Wang, Chenxi Wang, Linlin Wang, and Michael Kraft
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/jmems.2022.3141830

A Self-Sustained Mass Sensor With Physical Closed Loop Based on Thermal-Piezoresistive Coupled Resonators

Author(s): Aojie Quan, Hemin Zhang, Chen Wang, Chenxi Wang, Linlin Wang, Rui Amendoeira Esteves, Yangyang Guan, Chengxin Li, Michael Kraft
Published in: IEEE Transactions on Electron Devices, Issue 00189383, 2022, ISSN 0018-9383
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/ted.2022.3198035

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