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MOde-localized mass Sensors with Thermal Actuation and Piezoresistive DEtection

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Publications

A Thermal-Piezoresistive Self-Sustained Resonant Mass Sensor with High-Q (>95k) in Air

Author(s): Aojie Quan, Chen Wang, Hemin Zhang, Michel De Cooman, Chenxi Wang, Linlin Wang, Sina Sadeghpour, Michael Kraft
Published in: 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2021, Page(s) 168-171, ISBN 978-1-6654-1267-4
Publisher: IEEE
DOI: 10.1109/transducers50396.2021.9495471

On the Dynamic Range and Resolution of Thermal-Piezoresistive Resonant Mass Sensors

Author(s): Hemin Zhang , Aojie Quan, Chen Wang, Chenxi Wang, Linlin Wang, and Michael Kraft
Published in: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2022, ISSN 1057-7157
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/jmems.2022.3141830