On the Dynamic Range and Resolution of Thermal-Piezoresistive Resonant Mass Sensors
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Author(s):
Hemin Zhang , Aojie Quan, Chen Wang, Chenxi Wang, Linlin Wang, and Michael Kraft
Published in:
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2022, ISSN 1057-7157
Publisher:
Institute of Electrical and Electronics Engineers
DOI:
10.1109/jmems.2022.3141830
A Self-Sustained Mass Sensor With Physical Closed Loop Based on Thermal-Piezoresistive Coupled Resonators
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Author(s):
Aojie Quan, Hemin Zhang, Chen Wang, Chenxi Wang, Linlin Wang, Rui Amendoeira Esteves, Yangyang Guan, Chengxin Li, Michael Kraft
Published in:
IEEE Transactions on Electron Devices, Issue 00189383, 2022, ISSN 0018-9383
Publisher:
Institute of Electrical and Electronics Engineers
DOI:
10.1109/ted.2022.3198035