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Three-Dimensional Algorithms for Robust and Efficient Semiconductor Simulator

Objective

The numerical analysis and prediction of the detailed behaviour of semiconductor devices is an important step in the development of a new process. With the advent of submicron feature sizes, this analysis is becoming increasingly difficult. For certain c alculations one-dimensional or two-dimensional analysis is no longer sufficiently accurate. 3-D analysis is only just becoming available inside certain major industries and is prohibitively expensive in computing time.
The numerical analysis and prediction of the detailed behaviour of semiconductor devices is an important step in the development of a new process. With the advent of submicron feature sizes, this analysis is becoming increasingly difficult. For certain calculations one-dimensional or 2-dimensional analysis is no longer sufficiently accurate. 3-dimensional analysis is only just becoming available inside certain major industries and is prohibitively expensive in computing time.

The main achievement of this project was to develop, for 3-dimensional devices, a set of fully testesd algorithms, initially for steady state analysis and later for transient and small siganl loading conditions. The interaction with the temperature of the crystal lattice was also taken into account. This implied crossing new research frontiers in nonlinear numerical analysis techniques to solve the problem reliably and within reasonable computing costs. As part of the drive to reduce computing costs, the applicability of computers with advanced architectures was investigated.
The main achievement of this project was to develop, for 3D devices, a set of fully tested algorithms, initially for steadystate analysis and later for transient and small signal loading conditions. The interaction with the temperature of the crystal la ttice was also been taken into account. This implied crossing new research frontiers in nonlinear numerical analysis techniques to solve the problem reliably and within reasonable computing costs. As part of the drive to reduce computing costs, the appli cability of computers with advanced architectures was investigated. Following validation against measurements of real devices, the successful algorithms are being incorporated in computer systems in the industrial partners and in a common project researchcode.
On the basis of the first year's work, a reappraisal of priorities led to an effort to augment the work-package aiming to produce the project research code. The definition of the plan for this work-package was greatly strengthened. This work culminated inthe delivery of the first release of the code for the solution of the initial target of the offstate 3D problem, demonstrated at the project review in December1987, with further enhancements shown in 1988. The validity of the results were demonstratedusing an agreed set of benchmarks in 1989.
Fully transient 3D analysis at a reasonable computing cost is an ambitious goal. Even 2D solutions of this problem are only to be found inside large semiconductor companies (predominantly US and Japanese) at present, and it has been claimed that even these programs cannot solve all of the device problems in this category. The availability of such an analysis tool in Europe in 1990 puts Europe in a strongly competitive situation. In addition to the industrial use of the results by the companies in the project, the research project code will be made available to other European research organisations for research purposes.

Coordinator

Rutherford Appleton Laboratory (RAL)
Address
Chilton
OX11 0QX Didcot
United Kingdom

Participants (9)

ANALOG DEVICES BV
Ireland
Address
Raheen Industrial Estate
1 Limerick
GEC-Marconi Materials Technology Ltd
United Kingdom
Address
Elstree Way
WD6 1RX Borehamwood
IMEC VZW
Belgium
Address
Kapeldreef
3030 Heverlee
NATIONAL MICROELECTRONICS RESEARCH CENTRE
Ireland
Address
Prospect Row
X Cork
NEDERLANDSE PHILIPS BEDRIJVEN BV
Netherlands
Address
Kastanjelaan Postbus 218
5600 MD Eindhoven
Swansea University
United Kingdom
Address
Singleton Park
SA2 8PP Swansea
TRINITY COLLEGE DUBLIN
Ireland
Address

X Dublin 2
Thomson Microelectronics Srl (SGS)
Italy
Address
Via Carlo Olivetti
20041 Agrate Brianza Milano
Università degli Studi di Bologna
Italy
Address
Viale Risorgimento 2
40136 Bologna