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LASER BASED CHEMICAL VAPOUR DEPOSITION OF CORROSION AND WEAR RESISTANT LAYERS

Objective

The fundamental objective of the proposed project is the development of industrially applicable laser CVD processes for the local deposition of corrosion and wear resistant layers on high duty parts of industrial products and cutting or forming tools to enhance life time and reliability.
Development, building and improvement of equipment has resulted in adequate deposition equipment for all partners. A fibre optic pressure sensor to measure the partial gas pressure close to the sample in the cell, and laser induced chemical vapour deposition (LCVD) pyrometer at a single wavelength with the necessary software have been developed.

Hard titanium nitride layers have been deposited at temperatures of 80-350 C, only at very low deposition rates. Titanium, boron and carbon were deposited in preliminary experiments for titanium boron and titanium carbon deposition at a later stage. Hard, well adhering, corrosion resistant chromium oxygen carbon (Cr2OC) were made on high duty parts and functionally tested. The interaction of the laser beam with different steel substrates was examined and the interchange of samples for characterisation was promoted.
Both pyrolitic LCVD, in which the highest deposition rate is to be expected, and photolytic LCVD, which can play an important role in the early stages of deposition, will be studied.
Also combinations of photolytic and pyrolytic LCVD will be examined because of the interesting new possibilities in controlling layer composition and the production of multilayer coatings.

The films to be investigated include metals, e.g. chromium, nitrides, carbides and borides of a transition metal, e.g. titanium. Coated steel and cemented carbide products and tools will be functionally tested and the potential of coating and deposition method will be evaluated with tespect to its use on an industrial scale.

Coordinator

Philips
Address
Kastanjelaan 1, Build Saq-1
5600 MD Eindhoven
Netherlands

Participants (4)

FORTH-IESL
Greece
LABEL
Belgium
MIRTEC
Greece
Siemens AG
Germany
Address
Otto-hahn-ring 6
81739 München