Objective The objective of this project is to improve the quantitative submicron surface analysis of semiconductor material and of microelectronic circuits by using Resonant Ionization Mass Spectrometry (RIMS) to achieve a detection limit in the ppm range when analysing test circuits. The RIMS technique involves the ion beam sputtering the surface under analysis followed by resonant laser photoionisation of the sputtered neutral and their subsequent analysis in a mass spectrometer. The project consist of two stages: I) the partners will increase the sensitivity of their instruments by optimising the ion detection optics using Si standards containing a known amount of dopant, uniformly distributed through the wafers. Depending on the element under investigation, an increase in sensitivity up to a factor of 10-100 is expected with respect to a conventional SIMS; II) the optimised detection capability will be combined with the bombardment by highly focused ion beams, in order to provide submicron spatial resolution for surface analysis. A beam spot diameter of 100 nm is aimed at. The fundamental aspects involved in the use of Ga ions for primary bombardment will be investigated with respect to their influence on the quantification of the measurements. The applicability of RIMS to quantitative multilayer analysis will also be investigated. Fields of science natural sciencesphysical scienceselectromagnetism and electronicssemiconductivitynatural sciencesphysical scienceselectromagnetism and electronicsmicroelectronicsnatural scienceschemical sciencesanalytical chemistrymass spectrometrynatural sciencesphysical sciencesopticslaser physicsnatural sciencesphysical sciencesopticsspectroscopy Programme(s) FP3-MAT - Specific research and technological development programme (EEC) in the field of measurements and testing, 1990-1994 Topic(s) Data not available Call for proposal Data not available Funding Scheme CSC - Cost-sharing contracts Coordinator Centre National de la Recherche Scientifique (CNRS) Address 23 rue de loess 67037 Strasbourg France See on map EU contribution € 0,00 Participants (2) Sort alphabetically Sort by EU Contribution Expand all Collapse all Interuniversitair Mikro-Electronika Centrum VZW Belgium EU contribution € 0,00 Address Kapeldreef 75 3001 Heverlee See on map National Microelectronics Research Centre Ireland EU contribution € 0,00 Address University college 30 Cork See on map
