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Improved cvd process control by in-situ spectroscopic monitoring


1. Integration technology for spectroscopies into production processes
2. Novel spectroscopic technology relevant to process monitoring (NIRLD)
3. Knowledge base in spectroscopy and data handling
4. Full model of CVD process chemistry extending understanding and giving a predictive capability
5. Integration/spectroscopy and process knowledge for ceramic fibber production
6. Process FTIR spectrometer
7. NIRLD spectrometer adapted for CVD applications
8. Technology for application of in-situ monitoring to large area continuous CVD coating process - LowE glass.
9. Technology for application of in-situ monitoring to large throughput batch CVD coating process - Ceramics.
The goal of this programme is to improve CVD process
The goal of this programme is to improve CVD process
control by a multipurpose, knowledge based feedback
system for monitoring the CVD process with in situ
spectroscopic data as input information. The basis of the
programme is the development of in situ monitoring tools,
intelligent sensors, and advanced process control
concepts which can be used in a wide range of industrial
CVD processes.
In this programme, two commonly used, and distinctly
different, types of industrial CVD processes are taken as
test cases, being representative of important market
segments, architectural glass for energy control and
protective coatings for ceramic materials. These
different types of CVD technology comprise
1) large area, continuous atmospheric pressure CVD
2) high capacity low pressure batch process CVD,
Two prototype process control systems will be developed
consisting of
i. a selected multi detection monitoring system,
ii. an optical interface.
iii. the example (market segment) CVD reactor,
iv. software for real-time monitoring and data base
v. a closed loop process control system.
To achieve this, a through going task is the development
of novel, cheap, robust, non contact multi detection
sensors for on line monitoring in hostile environments
and of advanced procedures for signal processing. Success
in this innovative approach will further strengthen, and
widen, exploitation potential of this technology, by
extending application range and reducing system cost.
Objectives of the consortium are for significant
improvements in process yield (25%), operating costs
(>10%), raw material (20%) and product quality. Another
objective is to reduce environmental impact by up to a
40% reduction of waste materials and to improve safety
aspects significantly. A further objective is to reduce
new product development times by up to 30%.

Funding Scheme

CSC - Cost-sharing contracts


Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung eV (FhG)
Helmholtzstraße 20
01069 Dresden

Participants (6)

Inovex Innovative Experimental Technology GmbH
56,Margaretenstrasse 56
1050 Wien
Nederlandse Organisatie voor Toegepast Natuurwetenschappelijk Onderzoek
2,Den Dolech 2
5600 AN Eindhoven
Photonex Ltd
United Kingdom
35 Cable Depot Road
G81 1UY Clydebank
Pilkington Technology Management Ltd.
United Kingdom
Hall Lane Lathom
L40 5UF Ormskirk
Schunk Kohlenstofftechnik GmbH

35390 Gießen
University of Salford
United Kingdom
The Crescent
M5 4WT Salford