Reliable and sustainable adhesive bonding, coating or soldering for instance. in the assembly of optical. electrical and computer components primarily depends on the achievement of an ultimale clean surface. UV/ozone cleaning is capable in removing the final atomic layers of organic surface contaminants. The combination of UV-light and ozone decompose organic molecules into carbon dioxide and water. The UV-ozone technique is an easily accessible, fast, reliable, safe and ecologically sound cleaning method for ultimate surrace treatment, and an alternative for many acid/base and organic solvent based cleaning methods (CFCs, hydrocarbons, etc.). The objective of the project is to optimize the UV/ozone surface cleaning technique.