Objective
Gas composition is a fundamental parameter in the production of thin solid films by chemical vapour deposition (CVD), and it is especially critical in some advanced CVD processes such as low pressure CVD and atomic layer epitaxy (ALE). Because there do not exist on the market specific instruments for the measurement of gas composition in CVD plants, film producers are experiencing problems in controlling the level of contamination and in optimising the conditions of production. Our aim in the present project is to design and test a dedicated gas monitoring system based on Mass Spectrometry (lUS) and differential pumping in view of obtaining a system usable for routine monitoring of the CVD process, and at the same time in order to optimise the films quality by determining the functional properties (hardness, adherence, porosity, etc.) as a function of gas composition. This new instrument could lead to improved films, especially in some new production processes such as the micropulsed plasma enhanced chemical vapour deposition recently developed by one of the proposers (Rubig), as well as for some processes of high technological content, such as diamond and diamond-like films. This new technology, combined with the know-how gained on the influence of the process parameters on the functional properties of the films, would permit significant advances for the European industry in the strategically critical CVD manufacturing field.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
10040 Casalette Torino
Italy
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.