Analytical microfocus X-RAY-PEN

Objective

Two dimensional elemental surface microanalysis is traditionally performed with Scanning Electron Microprobe (SEM) or hole collimated X-Ray microfluorescence analysis ( XRF). The problem with the electron beam microprobe is that it requires a vacuum for making the analysis and the samples need to be conductive. The X-Ray induced XRF does not have this problem, but the hole collimator based systems have been too slow for most applications. The objective of this research project is to overcome these limitations by studying a new idea to realise the microanalysis by making use of the two recently developed technologies: High purity silicon detectors and X-Ray Capillary Optics (XCO). By placing the high purity silicon detectors to the close vicinity of output of the XCO tube, it is possible to fasten the measurement time of the XRF analysis with a factor up to 1000, compared to existing systems. The fields that can directly benefit from the new probe technology are, for example, the analysis of non-conductive samples, archaeological samples, hair and fiber samples, air filters, coatings in paper industry, composite materials or failure and uniformity analysis of semiconductors and hybrids.

Programme(s)

• FP4-BRITE/EURAM 3 - Specific research and technological development programme in the field of industrial and materials technologies, 1994-1998

Topic(s)

• 0203 - Reliability and quality of materials and products

Funding Scheme

Coordinator

Participants (1)