Kinetic studies of free radicals in reactive gas glow discharges using optical laser diagnostics

Project Information

Grant agreement ID: FMBI961038

Project closed

Start date 1 October 1996

End date 30 September 1999

Funded under

• Specific research and technological development programme in the field of the training and mobility of researchers, 1994-1998

Total cost No data

EU contribution No data

Coordinated by

Centre National de la Recherche Scientifique
France

Objective

The project concerns the development and use of laser diagnostics to study the kinetic of radicals in CH4, SiH4, NH3, H2 glow discharges. First, laser-induced fluorescence will be used to detect SiH and CH radicals in realistic conditions of Si and C film depositions. The results will be normalized with previously obtained mass spectrometry radical measurements. Second, a new laser system based on diode-laser injection-seeded optical parametric oscillator will be developed to detect hydrogen atoms using two-photon absorption laser-induced fluorescence. This diagnostic will be used to determined the H atom concentration profiles in the plasma. The influence of the nature of the substrate on the atom concentration will lead to the determination of surface loss probabilities. These measurements will complement the results previously obtained using other diagnostic techniques like optical emission, masse spectrometry and coherent anti-Stokes Raman scattering. Finally, experimental data will be used to interactively validate numerical models currently developed in the laboratory.

Fields of science (EuroSciVoc)

CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: https://op.europa.eu/en/web/eu-vocabularies/euroscivoc.

• natural sciences › chemical sciences › analytical chemistry › mass spectrometry
• natural sciences › physical sciences › optics › laser physics

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Programme(s)

• FP4-TMR - Specific research and technological development programme in the field of the training and mobility of researchers, 1994-1998

Topic(s)

• 0302 - Post-doctoral research training grants
• TP05 - Fluids and Plasmas

Call for proposal

Data not available

Funding Scheme

RGI - Research grants (individual fellowships)

Coordinator

Centre National de la Recherche Scientifique

• EU contribution: No data
• Address: Fort de Palaiseau ; 91120 Palaiseau ; France
• Total cost: No data

Participants (1)

Not available

Germany

• EU contribution: No data
• Total cost: No data