Study of thin dielectrics films by scanning thermal microscopy and complementary techniques

Project Information

Grant agreement ID: FMBI972191

Project closed

Start date 1 October 1997

End date 30 September 1998

Funded under

• Specific research and technological development programme in the field of the training and mobility of researchers, 1994-1998

Total cost No data

EU contribution No data

Coordinated by

ITALIAN INSTITUTE FOR THE PHYSICS OF MATTER
Italy

Objective

Research objectives and content
The question of power dissipation is a challenging issue for ULSI microelectronics power devices. The purpose of the project is to study thermal properties of very thin dielectrics films by a new and promising nanotechnique: scanning thermal microscopy. The study will involve the development of the thermal microscope, focusing on the reliability of measurements and the microscope capability to yield quantitative information on thin layers thermal properties. After testing the microscope on simple and well-known samples, thin layer of dielectrics, chosen for their potential applications in power devices, will be studied. These samples will also be characterised with different techniques: other scanning probe microscopy, nuclear and optical techniques, to obtain a complete knowledge of their physical and chemical properties. Training content (objective, benefit amd expected impact)
The project requires experimental skills and leads to the development of a new characterization method of very thin films implying a clear comprehension of the involved physical phenomena. This will greatly extend my competence to the field of nanotechnology as well as deepen my knowledge of thin films.
Links with industiy / industrial relevance (22)
The project is conducted in close collaboration with the SGS-Thomson site of Agrate Bianza (MI) where the MDM laboratory is located. This special situation favores technological transfert from university research laboratory to microelectronics industry.

Fields of science (EuroSciVoc)

CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: https://op.europa.eu/en/web/eu-vocabularies/euroscivoc.

• engineering and technology › nanotechnology
• natural sciences › physical sciences › optics › microscopy
• engineering and technology › materials engineering › coating and films
• natural sciences › physical sciences › electromagnetism and electronics › microelectronics

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Programme(s)

• FP4-TMR - Specific research and technological development programme in the field of the training and mobility of researchers, 1994-1998

Topic(s)

• 0302 - Post-doctoral research training grants
• TP09 - Condensed Matter - Mechanical and Thermal Properties

Call for proposal

Data not available

Funding Scheme

RGI - Research grants (individual fellowships)

Coordinator

ITALIAN INSTITUTE FOR THE PHYSICS OF MATTER

• EU contribution: No data
• Address: Via C. Olivetti 2 ; 20041 AGRATE BRIANZA ; Italy
• Total cost: No data

Participants (1)

Not available

France

• EU contribution: No data
• Total cost: No data