Objective
To integrate and evaluate the ASC 500 cleaner as one of the most important tools in the mask making process for production masks meeting the requirements of 0.25um wafer technology.
To prove the process quality of the ASC 500 (zero defects larger than 0.20um) mean time to failure (MTTF) and mean time to repair (MTTR).
For the evaluation of the ASC 500, a variety of masks (production masks and special test masks) with differing applications (CMOS/ASICs/Logic), mask types (Binary/ Phase shift masks) and production methods (E-beam/ Laser writing) will be used.
The goal of this project is the assessment of Steag HamaTech`s newly developed automated photomask cleaner (cassette to cassette) ASC 500. The assessment is to be carried out at the Siemens Mask Shop with masks for different applications.
The result of the assessment of the ASC 500 will be a benchmark showing best of breed features: process performance, yield, reliability, uptime, cycle-time and cost-of-ownership.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
80333 MUENCHEN
Germany
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.