Objective
Microoptical systems increase their impact on our daily lives, e.g. in tele-communication, medical sensoring and in projection systems. This project aims to exploit the shortest wavelength of high power lasers (VUV 157nm F2 laser) to improve the resolution and quality of several microfabrication processes. The high (hard) photon energy will allow Bragg gratings in fibers and planar wave guides as well as direct removal processes with increased material flexibility, higher processing speed, finer pitches and better reproducibility compared to longer wavelengths. As investigations are focused on brittle materials like glass and silicon there will be an obvious exploitation effect by end-users coming from telecommunication and electronics industry.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques.
- engineering and technologymaterials engineeringfibers
- natural scienceschemical sciencesinorganic chemistrymetalloids
- natural sciencesphysical sciencesopticslaser physics
- natural sciencesphysical sciencestheoretical physicsparticle physicsphotons
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Keywords
Call for proposal
Data not availableFunding Scheme
CSC - Cost-sharing contractsCoordinator
OX5 1QU OXFORD, KIDLINGTON
United Kingdom