Livrables
This result incorporates the basic process knowledge necessary to process materials as polymers, sol-gels, silicon, quartz and conductor foil. Special attention was paid to selective ablation of multi-layer samples. The related process development work expands a currently small body of knowledge relating to the laser micro machining characteristics of materials at 355 and 266 nm wavelengths. In addition to providing specific quantitative data for the software databases, it also yields more general qualitative information of interest to the laser micro machining community.
Recherche de données OpenAIRE...
Une erreur s’est produite lors de la recherche de données OpenAIRE
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