X-ray expert system for electronic films quality improvement (ESQUI)

Project Information

ESQUI

Grant agreement ID: G6RD-CT-1999-00169

Project closed

Start date 1 February 2000

End date 31 January 2003

Funded under

• Programme for research technological development and demonstration on "Competitive and sustainable growth 1998-2002"

Total cost € 1 313 450,00

EU contribution € 941 389,00

Coordinated by

ITALIAN INSTITUTE FOR THE PHYSICS OF MATTER
Italy

Objective

The project aims to develop an instrument for X-Ray diffractometry and X-Ray reflectivity dedicated to measurements of film thickness, crystalline phase, texture and residual stress of supported thin film dedicated to microelectroncis materials and devices. The design of such instrument will address the need of a non-destructive, fast and user friendly technique able to characterize thin film for the microelectronics industry. The project aims to provide a tool that overcomes the intrinsic limitation that ellipsometry has on ultra thin film thickness measurements, providing additional fundamental information on this films and delivering them in a user friendly form facilitating development of new processes in microelectronics. An expert system will be developed where appropriate computing algorithm for data interpretation and a friendly graphical user interface will be optimized according to the need of the end user.

Fields of science

• natural sciences › computer and information sciences › artificial intelligence › expert systems
• engineering and technology › materials engineering › coating and films
• natural sciences › physical sciences › electromagnetism and electronics › microelectronics

Programme(s)

• FP5-GROWTH - Programme for research technological development and demonstration on "Competitive and sustainable growth 1998-2002"

Topic(s)

• 1.1.3.-6. - RTD Activities of a Generic Nature : Measurements and Testing

Call for proposal

Data not available

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

ITALIAN INSTITUTE FOR THE PHYSICS OF MATTER

• EU contribution: No data
• Address: Via C. Olivetti 2 ; 20041 AGRATE BRIANZA ; Italy
• Total cost: No data

Participants (6)

CONSEJO SUPERIOR DE INVESTIGACIONES CIENTIFICAS

Spain

• EU contribution: No data
• Address: S/N,Cantoblanco S/N ; 28049 MADRID
• Total cost: No data

INEL INC.

France

• EU contribution: No data
• Address: street Chemin DPT 405 ; 45410 ARTENAY
• Total cost: No data

ITAL STRUCTURES DI PASTI FABIO

Italy

• EU contribution: No data
• Address: Via Monte Misone Zona Industriale Baltera ; 38066 RIVA DEL GARDA
• Total cost: No data

STMICROELECTRONICS S.R.L.

Italy

• EU contribution: No data
• Address: Via C. Olivetti 2 ; 20041 AGRATE BRIANZA
• Total cost: No data

UNIVERSIT DEGLI STUDI DI TRENTO

Italy

• EU contribution: No data
• Address: Via Mesiano 77 ; 38050 BIENO
• Total cost: No data

UNIVERSITE DU MAINE

France

• EU contribution: No data
• Address: Bd O. Messiaen ; 72017 LE MANS
• Total cost: No data