Objective
The project addresses the development of the analysis techniques needed for the full physical characterization of the new thin high-k dielectric layers which are now in the development phase and which will be essential for the future sub 100 nm device technologies. The emphasis of the project is on analysis techniques that have the potential for fast, non-destructive in-line application and on a number of complementary techniques that need developments related to quantification and depth resolution. The goal is the combination of complementary analysis on the same samples so that by the mutual input, the different measurement and analysis procedures can be fully qualified leading to well established and directly applicable methodologies for the quality control of these layers. Emphasis is related to the layer thickness, the interfacial layer and the quantification of the composition including contaminants.
Fields of science (EuroSciVoc)
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
3001 HEVERLEE
Belgium
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.