Objective
Ion Implantation Technology (IIT) Conferences constitute a biannual series aimed at applications of ion beams in microelectronics technologies inclusive corresponding development of equipment. The present meeting (IIT2000) is the 13th in the series. Ion implantation developed to become an almost exclusive technique in doping silicon semiconductor devices, one of they key problems in production of integrated devices. Challenges of the coming decade with huge foreseeable problems have already been formulated in a "Roadmap". This decade becomes critical as complexity of integrated circuits with their present day architecture will reach physical limits. To match the demands, a development in all aspects is inevitable, i.e in scientific background and modelling, in performance of the technique itself, in characterisation methods, and in implantation equipment capable of that high precision doping. This also implies that a present and future processing steps have to achieve a precision and reproductibility on an atomic level.
Ion implantation is based on knowledge of ion-solid interactions, which is in itself an extremely complex phenomenon. As topic of IIT is closest to industry among those the conference series, which deal with ion beam techniques, it is its ultimate goal to synthesise development in basics with practical and economically viable solutions. Thus, IIT is the conference, where scientists and engineers both from academics and from industry (the latter group constitutes > 50% of the participants) can meet and exchange ideas and experience. This view is enhanced by the school integrated to the conference, where international renowned experts, again, both from academics and industry, deliver lectures and serve the participants for three days.
ftp://ftp.cordis.lu/pub/improving/docs/HPCF-2000-00196-1.pdf(opens in new window)
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences physical sciences electromagnetism and electronics semiconductivity
- natural sciences physical sciences electromagnetism and electronics microelectronics
- natural sciences chemical sciences inorganic chemistry metalloids
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
Austria
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.