Objective
In plasma processing, the process conditions can generally not be completely defined because of the ageing of the process chamber and tool and even more so because of the influence of deposited layers, e.g. polymers, on the chamber walls. Therefore efficient and stable processing in the semiconductor industry requires a robust and reliable monitoring of the "internal state" of the plasma process chamber. In this proposal, critical plasma processes used in high volume IC production are in-situ monitored by means of a novel technique - Self Excited Electron Resonance Spectroscopy (SEERS). Furthermore, the data flow generated is integrated with Advanced Process Control (APC) concepts using SECS/GEM so enabling the control of process values such as etch rates and etch uniformity. This will lead to a general improvement in the overall plasma process stability. The final goal is to show an increase of manufacturing parameters such as Overall Equipment Effectiveness.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences chemical sciences polymer sciences
- natural sciences physical sciences electromagnetism and electronics semiconductivity
- natural sciences physical sciences optics spectroscopy
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
01099 DRESDEN
Germany
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.