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European access to manufacturing services for MEMS on SOI micromachining technologies.

Objective

The MEMSOI consortium is constituted by one SOI MST foundry, a MST marketing firm, one CAD tool provider and two institutes as contractors linked to a network of 6 design houses, spread across Europe. The goal of the proposal is to enable the access of European Industrial companies, SMEs and instituted to a full service from design to production of microsystems on a mature, qualified and stabilised process. This global customer approach will be enriched by giving them access to dedicated CAD tools and to a Multi-Project Wafer Service for prototyping and low volume production. The MEMSOI proposal includes actions in order to manage the day to day activity of the MPW and improve the service. Moreover, technical and economical guides for the use of other steps of existing process will be establishes on order pot ease their use. The partners will also proactively study the feasibility of new services such as a MOEMS MPW service. Finally strong dissemination and marketing actions will be made to increase the customers awareness on the potential of MST. Everything will be made to prepare the self funding of the foundry and to reinforce its marketing strength.

Objectives:
The aim of the MEMSOI proposal is to widen the use of microsystems technologies in Europe. This goal will be achieved by giving, customers an access to a global service from design to production, including dedicated CAD tools and MPW service, on SOI-based microsystem technology. This nature, qualified and stabilised process will be proposed through a European Network of design houses. This service will be made available for industrial companies, SMEs and instituted. The second objective is to define the technical and economical feasibility of new services such as new MPW'S. By reducing all the technological and economical barriers to microsystems development in Europe and by increasing the customers awareness on the potential of microsystems technologies, the consortium will bring new businesses and open up new markets for the European industry.

Work description:
The work programme of the MEMSOI project consists of putting together all the necessary services required by the customers to develop and have their MST components produced on the easiest and cheapest way. The work to be done includes the improvement of the quality of the existing MPW service on the Epi-SOI process by improving the design rules and widening its capability. The partners will also create a delicated CAD tools including existing MST cells and IC cells related to the Epi-SOI process. Such tools will further widen the access to that technology. Moreover the contractors will establish a strong partnership with six regional and experienced design houses representing the foundry across Europe and providing the European customers with design services on Tronic's Epi-SOI process. This partnership will complement the customers support service that the contractors will establish and will provide the customer with a regional access to the foundry and give them an access to diversified competencies. In parallel, the partners will define technical and economical guides for the use of standard process steps complementary to the Epi-SOI for the creation of customers custom processes when the Epi-SOI is not suitable. These guides will be complemented by the establishment of a customer support service. In complement the partners will support the customers on accessing ASIC and packaging solutions and services throughout Europe. All these services will be supported by a strong dissemination and marketing activity and the customer feedback will be used to define the feasibility of new services on new technologies for MEMS and MOEMS. At the end of the project the foundry and the CAD provider will be able to define their technological and exploitation plan in order to become self funded.

Funding Scheme

ACM - Preparatory, accompanying and support measures

Coordinator

Tronic's Microsystems
Address
15, Rue Des Martyrs
38054 Grenoble
France

Participants (10)

ACREO AB
Sweden
Address
Isafjordsgatan 22
164 40 Stockholm-kista
Applied Microengineering Ltd
United Kingdom
Address
68, Milton Park
OX14 4RX Abingdon
COMMISSARIAT A L' ENERGIE ATOMIQUE
France
Address
31-33 Rue De La Fédération
Paris
CONSEJO SUPERIOR DE INVESTIGACIONES CIENTIFICAS
Spain
Address
Calle Serrano 117
Madrid
Centre National de la Recherche Scientifique
France
Address
3, Rue Michel-ange
75794 Paris
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung E.V.
Germany
Address
Leonrodstrasse 54
80636 Muenchen
Memscap S.A.
France
Address
50, Allee Des Dauphins
38330 St Ismier
National Microelectronics Research Centre
Ireland
Address
Lee Maltings, Prospects Row
Cork
The Foundation for Scientific and Industrial Research at The Norwegian Institute of Technology - SINTEF
Norway
Address
Strindveien 4
7465 Trondheim
Yole Developpement Sarl
France
Address
45 Rue Sainte Genevieve
69006 Lyon