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High resolution inductive coil on chip position sensor for linear motors


The project is aimed at developing a new generation of piezo-electric linear motors with an integrated position sensor system for high-resolution position feedback. The objective is to develop an easy-to-mount, integrated, cost effective solution for position feedback with a resolution of 0,0001 mm.

The main objectives of the project are:

1. Development of a position sensor system with a resolution of 0.001 mm
2. Integration of this sensor into a piezo-electric linear motor
3. Generating a new microsystem based product for demonstration of microsystem technology capability for motor control purposes.

Work description:
The project is composed of three phases:

Phase 1: System validation (product definition and validation of the overall system configuration)
- WP1.1: Product definition and system design
- WP1.2: Hardware-software design
- WP1.3: Fabrication, system integration and validation of specification

Phase 2: Final prototype development
- WP2.1: Prototype design
- WP2.2: Fabrication and measurement
- WP2.3: System qualification

Phase 3: Coordination and dissemination
- WP3.0: Coordination and dissemination

1) Functional prototype of a cost-effective position sensor system in a linear motor
2) Demonstration of microsystem technology, in particular in coil-on-chip, in motor control systems

Funding Scheme

ACM - Preparatory, accompanying and support measures


Total Micro Solutions BV
Capitool 56
7500 AH Enschede

Participants (2)

CSEM Centre Suisse d'Electronique et de Microtechnique Sa
Rue Jaquet Droz 1
2007 Neuchatel
Nanomotion Ltd
Industrial Park
20692 Yokneam