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High resolution inductive coil on chip position sensor for linear motors

Objective

The project is aimed at developing a new generation of piezo-electric linear motors with an integrated position sensor system for high-resolution position feedback. The objective is to develop an easy-to-mount, integrated, cost effective solution for position feedback with a resolution of 0,0001 mm.

Objectives:
The main objectives of the project are:

1. Development of a position sensor system with a resolution of 0.001 mm
2. Integration of this sensor into a piezo-electric linear motor
3. Generating a new microsystem based product for demonstration of microsystem technology capability for motor control purposes.

Work description:
The project is composed of three phases:

Phase 1: System validation (product definition and validation of the overall system configuration)
- WP1.1: Product definition and system design
- WP1.2: Hardware-software design
- WP1.3: Fabrication, system integration and validation of specification

Phase 2: Final prototype development
- WP2.1: Prototype design
- WP2.2: Fabrication and measurement
- WP2.3: System qualification

Phase 3: Coordination and dissemination
- WP3.0: Coordination and dissemination

Milestones:
1) Functional prototype of a cost-effective position sensor system in a linear motor
2) Demonstration of microsystem technology, in particular in coil-on-chip, in motor control systems

Funding Scheme

ACM - Preparatory, accompanying and support measures

Coordinator

Total Micro Solutions BV
Address
Capitool 56
7500 AH Enschede
Netherlands

Participants (2)

CSEM Centre Suisse d'Electronique et de Microtechnique Sa
Switzerland
Address
Rue Jaquet Droz 1
2007 Neuchatel
Nanomotion Ltd
Israel
Address
Industrial Park
20692 Yokneam