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The calibration of scanning probe microscopes

Objective



SPMs, in particular AFMs begin to captivate fields of application in industrial research and development as well as quality assurance systems. There is one major annual international conference devoted to this theme and several national programmes have been established in the past few years with the goal of supporting industrial applications. At present, SPMs are employed in quality assurance systems (in compliance with EN 29000 / ISO 9000), mainly in microelectronics and computer component fabrication; however, the interest in SPMs is also growing in other industries, such as micromechanics and thin films. Besides the use for dimensional quality control, SPMs are used in R&D for lithography, both indirectly by exposing resist and directly by depositing material.
Amongst scientists in research and application, the unanimous opinion is that for measuring and lithographical purposes there is need for better positioning of the probe. In conventional SPMs, the voltage across the piezos is taken as position indicator. However, it is known that piezos suffer from hysteresis, and from time- and temperaturedependent creep. Conventional SPMs offer software corrections for this behaviour. The first real metrological SPMs with internal hardware corrections are now on the market. Both types need initial and periodic calibration. Users are uncertain about effective calibration procedures,and the necessity of recalibration. Currently, there are only vague hints or instructions in user manuals and in a few publications. The network aims at bringing together working groups which are primarily interested in the metrological use of SPMS - i. e. national institutes and research institutes to establish traceability and to develop calibration methods, and users and manufacturers to investigate these methods in practice. The aim of the network is to investigate standards (artefacts) and (existing) procedures concerning their practical applicability and their potential possibility with respect to their traceability (QS systems). The main work therefore will be to organize and carry through comparison measurements. For the beginning, already existing standards (artefacts) can be used. During the running time of this network, standards from the newly installed SMT project 'Transfer standards for calibration of scanning probe microscopes' will be used whenever possible and available. Some of the partners have developed algorithms for the evaluation of measurements and the calibration of SPMs. These procedures shall be investigated together with the standards by all partners, including especically the industrial users.
The results will be presented in reports and in an annual seminar.The synthesis report will contain a draft guideline for the calibration of SPMs.

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

Bundesrepublik Deutschland
Address
100,Bundesallee 100
38116 Braunschweig
Germany

Participants (12)

AABO AKADEMI UNIVERSITY
Finland
Address
3,Porthansgatan 3-5
20500 Turku / Abo
DANISH INSTITUTE OF FUNDAMENTAL METROLOGY
Denmark
Address
1,Matematiktorvet 307
2800 Lyngby
Dr. Brink labor für Mikroskopie und Nanotechnologie
Germany
Address
193 A,frankfurter Ring 193 A
80807 München
FEDERAL INSTITUTE FOR MATERIAL RESEARCH AND TESTING
Germany
Address
Unter Den Eichen 87
12205 Berlin
FRIES RESEARCH & TECHNOLOGY GMBH
Germany
Address
Friedrich-ebert-straße
51429 Bergisch Gladbach
Fries Research & Technology GmbH
Address
Friedrich-ebert-strasse
Bergischgladbach
NATIONAL RESEARCH COUNCIL OF ITALY
Italy
Address
Strada Delle Cacce 73
10135 Torino (Turin)
Nanosearch Membrane GmbH
Austria
Address
13/46,Hettenkofergasse 1Ü6
1160 Wien
National Physical Laboratory (NPL)
United Kingdom
Address
Queen's Road
TW11 0LW Teddington
Omicron Vakuumphysik GmbH
Germany
Address
78,Idsteinerstrasse 78
65232 Taunusstein
Technische Universiteit Delft
Netherlands
Address
1,Lorentzweg 1
2600 GA Delft
Universität der Bundeswehr Hamburg
Germany
Address
85,Holstenhofweg 85
22043 Hamburg