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Content archived on 2024-06-11

Development of a fast optical 3d-scanner with micromirror array for illumination and detection

Objective

Objectives
During this project a new technology for the 3D-inspection of small parts following the principle of confocal imaging will be built up and analysed. The key part will be a so-called Digital Micromirror Device (DMDTM), consisting of 864x576 programmable mirrors. Each of these has dimensions of approx. 13 x 13µm2 and can be set to an angle eighter -10 or +10 . So, every mirror element of the DMD inherently represents a pinhole. One DMD can be divided into two sub-arrays of micromirrors, that can be combined to obtain one confocal measurement system itself. The first is used as the illumination part, the second as the detecting part. Thus, using the whole aperture of the DMD, an amount of some ten confocal systems can work in parallel. This new approach does not scan the specimen using only one point as current systems do, as it allows scanning with some ten to hundred points. The following specifications shall be reached during the project:
* measurement duration: in the range of seconds
* measurement volume: ranging from 10 x 10 x 5mm3 to 10 x 10 x 5µm3
* accuracy: ranging from 0,1µm to 10nm depending on the measurement volume


Backgound
Micro-System-Technology (MST) is currently in the state of extensive research. With the rescaling of the dimensions in MST the demands concerning the shape and surface quality of future products will increase steadily. As small and medium enterprises will be a main force in the field of MST in the next 5 to 10 years due to their higher flexibility, it will be essential for them to be offered an adequate measurement system that sufficiently satisfies their demands. Systems available at present, like for instance fringe projection systems, are, mostly, not able to fulfil all demands as they are too expensive, one the one hand, or too slow, on the other hand.
Workprogramme:
Work package I: - Definition of user demands (Task leader: Nanofocus)
Specification and - Analysis of state-of-the-art (T. l.: IPT)
system layout: - Definition of properties of the DMD (T. l.: GFM)
- Analysis of optics design (T. l.: GFM)
Work package II: - Experimental set-up (T. l.: IPT)
Mechanical construction - Design and construction of demonstrator (T. l.: TUE)
and manufacturing - Design and construction of prototype (T. l.: TUE)
Work package III: - Nomenclature (T. l.: IPT)
Software development - Software encoding (T. l.: IPT)
- Hardware adaptation (T. l.: IPT)
- Advanced software testing (T. l.: Procornea)
Work package IV: - Comparison to current systems (T. l.: Axxicon)
Testing and calibration - Test system-handling (T. l.: Gruber)
- Calibration and standardisation (T. l.: NMI)
- QM aspects and certification (T. l.: IPT)
- Project management (T. l.: IPT)

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CRS - Cooperative research contracts

Coordinator

GFMESSTECHNIK GMBH
EU contribution
No data
Address
Warthestrasse 21
14513 TELTOW
Germany

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Total cost

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Participants (7)

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