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Preparing R2 extension to 300mm for BCD Smart Power

Objective

R2POWER300 is committed to challenge the following Objectives:
• Development and manufacturing of a multi-KET Pilot Line
(i.e. Nanoelectronics, Nanotechnology, Advanced Manufacturing)
• Energy Efficiency and CO2 Reduction megatrends.

The project aims to achieve the following Goals:
1. Set the stage for the future extension to 300mm of the R2 Fab facility located in Agrate Brianza (Italy) - i.e. line’s specification, tools’ evaluation and screening, new process’s optimization and characterization, etc.
2. To evaluate, characterize and optimize the equipments and process necessary to achieve the new BCD10 technology, featuring 90nm lithography, at 300mm wafer size. BCD (i.e. Bipolar + CMOS + DMOS) is a unique smart power technology invented by ST in the mid ‘80s (CMOS’s gate length was 4 m at that time!). As of today BCD is one of the key technology assets of ST and the indefatigable evolution and challenging roadmap makes ST a world-class leader on smart power ICs.
3. Advanced System in Packages: some SiP activity will be performed, with specific reference to Sintering based die-attach, thermal analysis and dedicated packaging solution for high density ALD capacitors.

Field of science

  • /engineering and technology/nanotechnology
  • /engineering and technology/nanotechnology/nanoelectronics
  • /natural sciences/chemical sciences/analytical chemistry/calorimetry
  • /engineering and technology/environmental engineering/waste management/energy efficiency

Call for proposal

ECSEL-2014-2
See other projects for this call

Funding Scheme

ECSEL-IA - ECSEL Innovation Action

Coordinator

STMICROELECTRONICS SRL
Address
Via C.olivetti 2
20864 Agrate Brianza
Italy
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EU contribution
€ 1 451 930,74

Participants (10)

L.P.E. SPA
Italy
EU contribution
€ 161 759,82
Address
Via Dei Giovi 7
20021 Baranzate Milano
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
POLITECNICO DI TORINO
Italy
EU contribution
€ 59 067,03
Address
Corso Duca Degli Abruzzi 24
10129 Torino
Activity type
Higher or Secondary Education Establishments
CONSORZIO NAZIONALE INTERUNIVERSITARIO PER LA NANOELETTRONICA
Italy
EU contribution
€ 97 115
Address
Via Toffano 2
40125 Bologna
Activity type
Research Organisations
UNIVERSITA DI PISA
Italy
EU contribution
€ 51 442,60
Address
Lungarno Pacinotti 43/44
56126 Pisa
Activity type
Higher or Secondary Education Establishments
CONSIGLIO NAZIONALE DELLE RICERCHE
Italy
EU contribution
€ 75 403,76
Address
Piazzale Aldo Moro 7
00185 Roma
Activity type
Research Organisations
ASM EUROPE BV

Participation ended

Netherlands
EU contribution
€ 0
Address
Versterkerstraat 8
1322 AP Almere
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Besi Netherlands BV
Netherlands
EU contribution
€ 49 681,50
Address
Ratio 6
6921 RW Duiven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
NANO DESIGN SRO
Slovakia
EU contribution
€ 68 034,99
Address
Drotarskacesta 6385 19A
811 04 Bratislava
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
PICOSUN OY
Finland
EU contribution
€ 28 837
Address
Tietotie 3
02150 Espoo
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ASM EUROPE BV
Netherlands
EU contribution
€ 17 000
Address
Versterkerstraat 8
1322 AP Almere
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)