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Content archived on 2024-05-18

Rigorous diffraction theory for modeling of future lithography

Fields of science (EuroSciVoc)

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Topic(s)

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Call for proposal

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Funding Scheme

RGI - Research grants (individual fellowships)

Coordinator

FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
EU contribution
No data
Address
Schottkystrasse 10
91058 ERLANGEN
Germany
Total cost
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