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Implementing and calibration of integrated optical strategy for in situ metrology of micro-electro-mechanical systems

Fields of science (EuroSciVoc)

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Topic(s)

Data not available

Call for proposal

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Funding Scheme

RGI - Research grants (individual fellowships)

Coordinator

UNIVERSITÉ DE FRANCHE-COMTÉ
EU contribution
No data
Address
Route de Gray 16
25030 BESANCON
France
Total cost
No data