Dimensional micro and nanometrology using areal topography data produced by 3D surface metrology instruments

Project Information

METROSURF

Grant agreement ID: 624770

Project closed

Start date 9 February 2015

End date 31 October 2017

Funded under

• Specific programme "People" implementing the Seventh Framework Programme of the European Community for research, technological development and demonstration activities (2007 to 2013)

Total cost € 309 235,20

EU contribution € 309 235,20

Coordinated by

THE UNIVERSITY OF NOTTINGHAM
United Kingdom