The production and calibration of a sub-micrometre photomask linewidth standard

Project Information

Grant agreement ID: MAT1940073

Project closed

Start date 1 January 1995

End date 30 June 1997

Funded under

• Specific research and technological development programme (EEC) in the field of measurements and testing, 1990-1994

Total cost € 0,00

EU contribution No data

Coordinated by

National Physical Laboratory (NPL)
United Kingdom

Programme(s)

• FP3-MAT - Specific research and technological development programme (EEC) in the field of measurements and testing, 1990-1994

Topic(s)

Data not available

Call for proposal

Data not available

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

National Physical Laboratory (NPL)

• EU contribution: No data
• Address: Queen's Road ; TW11 0LW Teddington ; United Kingdom
• Total cost: No data

Participants (2)

Dupont Photomask SA

France

• EU contribution: No data
• Address: Rue Olivier Perroy ; 13790 Rousset
• Total cost: No data

PHYSIKALISCH-TECHNISCHE BUNDESANSTALT

Germany

• EU contribution: No data
• Address: Bundesallee 100 ; BRAUNSCHWEIG
• Total cost: No data