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The production and calibration of a sub-micrometre photomask linewidth standard

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

National Physical Laboratory (NPL)
Address
Queen's Road
TW11 0LW Teddington
United Kingdom

Participants (2)

Dupont Photomask SA
France
Address
Rue Olivier Perroy
13790 Rousset
PHYSIKALISCH-TECHNISCHE BUNDESANSTALT
Germany
Address
Bundesallee 100
Braunschweig