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The production and calibration of a sub-micrometre photomask linewidth standard

Topic(s)

Data not available

Call for proposal

Data not available

Coordinator

National Physical Laboratory (NPL)
Address
Queen's Road
TW11 0LW Teddington
United Kingdom
 

Participants (2)

Dupont Photomask SA
France
Address
Rue Olivier Perroy
13790 Rousset
 
PHYSIKALISCH-TECHNISCHE BUNDESANSTALT
Germany
Address
Bundesallee 100
Braunschweig