The production and calibration of a sub-micrometre photomask linewidth standard | Project | FP3 | CORDIS | European Commission

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CORDIS
EU research results

Programme(s)

FP3-MAT - Specific research and technological development programme (EEC) in the field of measurements and testing, 1990-1994

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

National Physical Laboratory (NPL)

Address

Queen's Road
TW11 0LW Teddington
United Kingdom

Participants (2)

Dupont Photomask SA

France

Address

Rue Olivier Perroy
13790 Rousset

PHYSIKALISCH-TECHNISCHE BUNDESANSTALT

Germany

Address

Bundesallee 100
Braunschweig

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Last update: 19 June 1995
Record number: 27429

Permalink: https://cordis.europa.eu/project/id/MAT1940073/

© European Union, 2020

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