The production and calibration of a sub-micrometre photomask linewidth standard

Programme(s)

• FP3-MAT - Specific research and technological development programme (EEC) in the field of measurements and testing, 1990-1994

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

National Physical Laboratory (NPL)

Address

Queen's Road
TW11 0LW Teddington
United Kingdom

Participants (2)

Dupont Photomask SA

France

Address

Rue Olivier Perroy
13790 Rousset

PHYSIKALISCH-TECHNISCHE BUNDESANSTALT

Germany

Address

Bundesallee 100
Braunschweig