Periodic Reporting for period 1 - INSPIRE (InP on SiN Photonic Integrated circuits REalized through wafer-scale micro-transfer printing)
Reporting period: 2021-01-01 to 2022-06-30
Based on these target metrics, a process flow was established. Three different InP epitaxial layerstacks were designed for high-speed, high-gain and high-power components. A first library of components was developed, i.e. a so-called process design kit (PDK), to allow end-users to design their own photonic integrated circuits. A first run was designed, including first versions of the demonstrators and a set of test structures to assess process quality and capability. The InP run is being processed now and the SiN run has been completed. The next planned step is then the transfer of the InP coupons on the SiN target wafer, using micro-transfer printing, and characterize this first full INSPIRE run.
Based on these initial findings, including some short-loop experiments, a second run is now being designed, and fabrication will start Fall 2022. This run will include updated versions of the three demonstrator designs. Specific ongoing efforts to boost the INSPIRE platform performance are the optimization of the thermal impedance of the InP amplifiers, the integration density of the active components, and the optimization of the stamps and alignment for the micro-transfer printing technique.
It is anticipated that the INSPIRE platform will boost state of the art in micro-transfer printing in three ways. First this is done by improving the quality of the individual components, more specific increasing the gain and the bandwidth of the InP actives, while keeping the loss of the SiN passives low. Secondly this is done by increasing the integration density of the actives, by combining multiple components on a coupon. Thirdly this is done by improved alignment accuracy, for lower overall insertion loss.
This in turn leads to lower loss complex circuits, which enables higher integration density and/or lower noise operation. The three selected demonstrators, i.e. datacenter switch, microwave photonics engine and fiber sensor readout, are all critically enabled by these INSPIRE capabilities. At the same time, these demonstrators are relevant for large markets, such as wireless communications, datacenter communications and structural sensing, thus ensuring maximum impact of the INSPIRE technology.