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Single-Chip Integration of MEMS Micropumps with Optical Waveguides for Laser Absorption Spectroscopy

Periodic Reporting for period 2 - VacLAS-Chip (Single-Chip Integration of MEMS Micropumps with Optical Waveguides for Laser Absorption Spectroscopy)

Reporting period: 2025-04-01 to 2026-03-31