Unique ALD/MLD-Enabled Material Functions

Project Information

UniEn-MLD

Grant agreement ID: 101097815

DOI

10.3030/101097815

EC signature date 4 May 2023

Start date 1 June 2023

End date 31 May 2028

Funded under

• European Research Council (ERC)

Total cost

€ 2 499 645,00

EU contribution

€ 2 499 645,00

Coordinated by

AALTO KORKEAKOULUSAATIO SR
Finland

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Links to deliverables and publications from FP7 projects, as well as links to some specific result types such as dataset and software, are dynamically retrieved from OpenAIRE .

Publications

Peer reviewed articles (13)

Artificial solid electrolyte interphases by atomic and molecular layer deposition

Author(s): Karppinen, Maarit; Madadi, Milad; Miikkulainen, Ville
Published in: Dalton Transactions, 2025, ISSN 1477-9226
Publisher: Royal Society of Chemistry
DOI: 10.1039/D5DT00526D

Atomic and Molecular Layer Deposition of Functional Thin Films Based on Rare Earth Elements

Author(s): Devi, Anjana; Ghazy, Amr; Karppinen, Maarit; Zanders, David
Published in: Advanced Materials Interfaces, Issue 12/4, 2025, ISSN 2196-7350
Publisher: Wiley
DOI: 10.1002/ADMI.202400274

In situ growth of ultrathin Y2O3 capping layers for Eu-organic thin films via atomic/molecular layer deposition

Author(s): Ghazy, Amr; Jussila, Topias; Karppinen, Maarit; Lastusaari, Mika; Pekkanen, Joona; Virta, Anni
Published in: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Issue 43/2, 2025, ISSN 0734-2101
Publisher: AIP Publishing
DOI: 10.1116/6.0004237

Atomic/molecular layer deposition of europium-organic thin films on nanoplasmonic structures towards FRET-based applicationstrolyte Thin Films for Li-Ion Batteries by Atomic Layer Deposition

Author(s): Ghazy, Amr; Karppinen, Maarit; Subramaniyam, Nagarajan; Ylönen, Jonas
Published in: Nanoscale, Issue 15/38, 2023, ISSN 2040-3364
Publisher: Royal Society of Chemistry
DOI: 10.1039/D3NR04094A

Conformal High-Aspect-Ratio Solid Electrolyte Thin Films for Li-Ion Batteries by Atomic Layer Deposition

Author(s): Milad Madadi; Mari Heikkinen; Anish Philip; Maarit Karppinen
Published in: ACS Applied Electronic Materials, Issue 6/3, 2024, ISSN 2637-6113
Publisher: American Chemical Society
DOI: 10.1021/ACSAELM.3C01565

Atomic layer deposition of magnetic thin films : Basic processes, engineering efforts, and road forward

Author(s): Jussila, Topias, Karppinen, Maarit, Nielsch, Kornelius, Philip, Anish, Tripathi, Tripurari
Published in: Applied Physics Reviews, Issue 10/4, 2023, ISSN 1931-9401
Publisher: AIP Publishing
DOI: 10.1063/5.0172732

Conformal Zn-Benzene Dithiol Thin Films for Temperature-Sensitive Electronics Grown via Industry-Feasible Atomic/Molecular Layer Deposition Technique

Author(s): Devi, Anjana; Jussila, Topias; Karppinen, Maarit; Kinnunen, Jussi; Obenlüneschloß, Jorit; Philip, Anish; Preischel, Florian; Zanders, David
Published in: Small, Issue 20/40, 2024, ISSN 1613-6810
Publisher: Wiley
DOI: 10.1002/SMLL.202402608

Excitation Wavelength Engineering through Organic Linker Choice in Luminescent Atomic/Molecular Layer Deposited Lanthanide-Organic Thin Films

Author(s): Ghazy, Amr; Karppinen, Maarit; Lastusaari, Mika
Published in: Chemistry of Materials, Issue 35/15, 2023, ISSN 0897-4756
Publisher: American Chemical Society
DOI: 10.1021/ACS.CHEMMATER.3C00955

Layer-Engineered Functional Multilayer Thin-Film Structures and Interfaces through Atomic and Molecular Layer Deposition

Author(s): Ghiyasi, Ramin; Heikkinen, Mari; Karppinen, Maarit
Published in: Advanced Materials Interfaces, Issue 12/4, 2025, ISSN 2196-7350
Publisher: Wiley
DOI: 10.1002/ADMI.202400262

Atomic-layer-deposited CuxCryOz thin films: Optoelectronic properties and potential application as hole-selective contacts for c-Si solar cells

Author(s): Bartholazzi, Gabriel; Black, Lachlan E.; Devi, Anjana; Jussila, Topias; Karppinen, Maarit; Macdonald, Daniel H.; Obenlüneschloß, Jorit; Savin, Hele; Vähänissi, Ville
Published in: Applied Surface Science, Issue 683, 2025, ISSN 0169-4332
Publisher: Elsevier BV
DOI: 10.1016/J.APSUSC.2024.161793

Block Copolymer Approach toward Selective Atomic-Layer Deposition of ZnO Films

Author(s): Dong, Yujiao; Karppinen, Maarit; Philip, Anish; Vapaavuori, Jaana
Published in: Advanced Engineering Materials, Issue 26/4, 2024, ISSN 1438-1656
Publisher: Wiley
DOI: 10.1002/ADEM.202300937

Chemical Bonding and Crystal Structure Schemes in Atomic/Molecular Layer Deposited Fe-Terephthalate Thin Films

Author(s): Ameloot, Rob; Eklund, Kim; Glatzel, Pieter; Jussila, Topias; Karppinen, Maarit; Karttunen, Antti J.; Lindén, Johan; Motohashi, Teruki; Philip, Anish; Rubio-Giménez, Víctor; Vasala, Sami
Published in: Chemistry of Materials, Issue 36/13, 2024, ISSN 0897-4756
Publisher: American Chemical Society
DOI: 10.1021/ACS.CHEMMATER.4C00555

Highly stable and conformal Ti-organic thin films from sustainable precursors via atomic/molecular layer deposition towards green energy applications

Author(s): Haimi, Eero; Karppinen, Maarit; Lone, Umaid; Partanen, Olga; Philip, Anish
Published in: Chemical Communications, Issue 60/5, 2025, ISSN 1359-7345
Publisher: Royal Society of Chemistry
DOI: 10.1039/D4CC05425C