TP24 - Development of wafer singulation technique for MEMS and MOX gas sensors using 355 nm UV laser ablation process
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Author(s):
S. Stoukatch, F. Dupont, J. -M. Redouté
Published in:
Poster II, 2025
Publisher:
AMA Service GmbH, Von-Münchhausen-Str. 49, 31515 Wunstorf
DOI:
10.5162/EUROSENSORS2025/TP24
A Study of 355 Nm UV Laser Ablation Process for Singulation of Silicon Wafers
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Author(s):
Serguei Stoukatch, Francois Dupont, Jean-Michel Redouté
Published in:
2025 25th European Microelectronics and Packaging Conference & Exhibition (EMPC), 2025
Publisher:
IEEE
DOI:
10.23919/EMPC63132.2025.11222503
MP39 - Novel multi pixel-based gas sensor fabricated by local Inkjet printing of metal-oxides structures
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Author(s):
A. Debot, V. Rogé, S. Glinsek, S. Girod, N. Adjeroud, R. Leturcq, H. Pakdel, D. Zappa, I. Boehme
Published in:
Poster I, 2025
Publisher:
AMA Service GmbH, Von-Münchhausen-Str. 49, 31515 Wunstorf
DOI:
10.5162/EUROSENSORS2025/MP39
MP44 - The Dimensionality of MOX Sensors in Air Quality assessment
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Author(s):
L. Miranda, B. Dorizzi, M. Hariz, D. Petrovska, J. Boudy, N. Redon, C. Duc, M. Verriele, J. Montalvão
Published in:
Poster I, 2025
Publisher:
AMA Service GmbH, Von-Münchhausen-Str. 49, 31515 Wunstorf
DOI:
10.5162/EUROSENSORS2025/MP44
Advanced Wafer Singulation Techniques for Miniaturized Metal-oxide (MOX) Micro-hotplates Based Gas Analyzer
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Author(s):
Serguei Stoukatch, Francois Dupont, Jean-Michel Redouté
Published in:
2024 IEEE 10th Electronics System-Integration Technology Conference (ESTC), Issue 74, 2024
Publisher:
IEEE
DOI:
10.1109/ESTC60143.2024.10712018